Harmonic Drive Systems Inc.

Yoshio Yamaguchi

Toshimi Yamagishi

Yukio Sawada

A rotation transmitting device 1 introduces rotation into a vacuum side space 200 via a flexible meshing type gear drive 4 from an atmosphere side space 100. A first spacer 15 is disposed between ball bearings 13 and 14 of a rotation output shaft 5 positioned at the vacuum side, and a magnetic circuit is formed passing from the spacer 15 and through the ball bearing 13, a shaft portion 51 of the rotation output shaft 5 and the ball bearing 14. A magnetic fluid is filled as lubricant for lubricating potions of the ball bearings 13 and 14, which is retained on these portions by magnetic force generated by the magnetic circuit, whereby these portions are always lubricated appropriately. The magnetic fluid retained on these portions captures wear particles or other dust generated from the ball bearings 13 and 14, preventing these particles from leaking out to the vacuum side.

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Chiba-ken, Japan

Yoshio Yamaguchi