Ulvac, Inc.

Yoshio Sunaga

Masato Fukao

Hiroshi Kikuchi

Junpei Yuyama

Takumi Namekawa

Masasuke Matsudai

Kouji Hane

Hidenori Suwa

An organic thin film deposition device that is compact and high in processing capability is provided. Inside a vacuum chamber, first and second substrate arrangement devices that can be in a horizontal posture and a standing posture are provided; and when in the standing posture, substrates held by the respective substrate arrangement devices and first and second organic vapor discharging devices face each other. When one of the substrate arrangement devices is in the horizontal posture, masks and the substrates are lifted up by alignment pins and transfer pins and are replaced with a substrate not yet film formed, for position adjustment. With one organic thin film deposition device, two substrates can be processed at the same time.

Organic thin film deposition device, organic EL element manufacturing device, and organic thin film deposition method

A technology for placing spacers free from the occurrence of streaks is provided. Random numbers are generated by a computer, and made in one-by-one association with discharge positions of an object for discharging every generation, and stored in a memory unit of the computer. Coefficient values are determined for the respective discharge positions based on the stored random numbers, and individual voltage values to be required for the respective discharge positions are calculated through the multiplication of voltages set for respective nozzle holes Nto Nby the coefficient values. When the respective voltages corresponding to the discharge positions are applied to piezoelectric elements inside a discharge head and a discharge liquid containing the spacers are discharged through the plural nozzles Nto Nprovided in the discharge head, the spacers are placed on the object for discharging by numbers according to the random numbers.

Spacer placing method

Growing community of inventors

Chigasaki, Japan

Yoshio Sunaga