Mitutoyo Corporation

Yoshio Saruki

Yukiharu Ohtsuka

Yoshio Moriya

Hisayoshi Sakai

Taizo Nakamura

Yasushi Fukumoto

Tatsuya Narumi

Tetsuhiko Kubo

An optical interferometric measuring instrument comprises a laser light source , an interferometer portion , a reflecting mirror , a bellows driving carriage , and a fixed portion . The bellows driving carriage moves together with a slider . A main bellows is disposed between the bellows driving carriage and the fixed portion . An auxiliary bellows is disposed between the reflecting mirror and the bellows driving carriage . An auxiliary bellows is disposed between the interferometer portion and the fixed portion . It is possible to avoid the variation of the laser wavelength ascribable to the change of the refractive index of air when the laser light passes through the air.

Optical interferometric measuring instrument and laser interference apparatus

To provide a surface profile measurement apparatus capable of efficient measurement of the surface profile of an object. A diamond indenter ( ) is movably mounted. The tip end of the diamond indenter ( ) is irradiated by light, and the light reflected by the tip end ( ) is condensed through a lens ( ). The condensed light is observed by a photo sensor ( ) for measurement of the curvature radius of the tip end ( ). Meanwhile, the light reflected by the tip end ( ) and the light reflected by a reference body ( ) together cause an interference fringe. The interference fringe is observed by a CCD camera ( ) to measure the surface profile of tip end ( ).

Surface profile measurement apparatus

A body,placed thereon with a table,put thereon with an object to be measured W, and a portal frame,supporting both ends of rail,to the body through pillars,A and,B, the rail being placed above the table,and extending along a moving direction of a pair of probes,A and,B, are provided. A pair of sliders,A and,B are movably supported by the rail,. The pair of the probes is extended downward from the sliders,A and,B to be abutted to the object W put on the table,. The flexural deformation of the probes,A and,B is decreased due to the shorter length of the probes,A and,B, so that the high accurate measurement is achieved and a relative measurement is omitted.

Measuring instrument, probe for the same, and measuring method

A body 1 placed thereon with a table 35 put thereon with an object to be measured W, and a portal frame 41 supporting both ends of rail 43 to the body through pillars 42A and 42B, the rail being placed above the table 35 and extending along a moving direction of a pair of probes 91A and 91B, are provided. A pair of sliders 51A and 51B are movably supported by the rail 43. The pair of the probes are extended downward from the sliders 51A and 51B to be abutted to the object W put on the table 35. The flexural deformation of the probes 91A and 91B is decreased due to the shorter length of the probes 91A and 91B, so that the high accurate measurement is achieved and a relative measurement is omitted.

Growing community of inventors

Kawasaki, Japan

Yoshio Saruki