Eagle Industry Co., Ltd.

Yoshio Osawa

Koichi Mori

Kiyotaka Furuta

A liquid supply system providing a stable pump operation even when ultra-low temperature liquid including slurry is set as a liquid feed target. The liquid supply system that supplies ultra-low temperature liquid including a slurry component by expansion and contraction of bellowsand. At least a region in the bellowsandthat is in contact with the liquid is coated with resin having a low temperature brittle temperature that is equal to or lower than an operating temperature of the liquid supply system.

Liquid supply system

A liquid supply system includes first and second bellowsandarranged in series in an expanding/contracting direction thereof in a vesseland having first end portions respectively, which are close to each other and fixed to an inner wall of the vessel, and also having second end portions respectively, which are distant from each other and movable in the expanding/contracting direction. An inner space of the vessellocated outside the first bellowsserves as a first pump chamber P. An inner space of the vessellocated outside the second bellowsserves as a second pump chamber P. An inner space of the vessellocated inside the first and second bellowsandserves as a sealed space R. A shaftto which the respective second end portions of the first and second bellowsandare fixed is reciprocally moved to expand/contract the first and second bellowsand

A gate valve having a valve body, a valve rod, a regulation device, a cam mechanism and a drive for supplying a straight-move force to the cam mechanism is provided. The valve rod is held so that it can move in a straight-move direction of opening and closing the valve via a pair of linear guides provided on both sides of the valve rod.

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Tokyo, Japan

Yoshio Osawa