Hamamatsu-photonics K.k.

Yoshio Natsume

Takuya Homme

Toshio Takabayashi

Hiroto Sato

Takaharu Suzuki

Takeo Sugawara

The present invention aims to provide a highly reliable relief pattern detection device, including a slant FOPhaving an input end surfacewith which an object surface makes contact and an output end surfacesubstantially parallel to the input end surface, an irradiation light sourcedisposed on the output end surfaceside of the slant FOP, for irradiating the output end surfacewith light, and a CCD cameradisposed on the output end surfaceside of the slant FOP, for detecting a relief pattern based on light emitted from the output end surface, in which optical axes Rf of optical fibers are inclined so as to create a first angle &#x3b1; less than 90&#xb0; in one direction from the output end surfacewithin a predetermined plane substantially perpendicular to the output end surface, the irradiation light sourceirradiates the output end surfacewith light in a direction to create a second angle &#x3b2; less than 90&#xb0; in the other direction from the output end surfacewithin the predetermined plane, and the first angle &#x3b1; and the second angle &#x3b2; are set so that light made incident from the output end surfaceinto a coreof the optical fiberenters into a cladding

Relief pattern detection device

An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.

Scintillator panel and radiation image sensor

An image pickup device according to the present invention comprises (1) a fiber optical plate constituted by bundling a plurality of optical fibers, including a core and a cladding covering an outer periphery thereof and having a light incident surface and a light-emitting surface inclined with respect to the optical axis direction of a plurality of optical fibers; (2) a plurality of columnar crystals having light permeability, formed on the light-emitting surface of the fiber optical plate; and (3) a solid-state image pickup device having photoelectric converters arrayed and formed in two-dimensional fashion on a main surface of a semiconductor substrate and optically coupled to a plurality of columnar crystals.

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Hamamatsu, Japan

Yoshio Natsume