Nippon Kogaku K.k.

Tokyo Shibaura Denki Kabushiki Kaisha

Yoshio Mori

Kazushige Ooi

Nobuaki Yoshida

Kazunori Imamura

Shigekazu Fujiwara

Sumio Sakai

A projection optical apparatus used for projecting a pattern in the photolithographic operation for semiconductor device fabrication and a photographic mask used with the apparatus. In the projection optical apparatus, the reflected light from the pattern of a mask is utilized in place of the transmitted light through the pattern of the mask for the purpose of projecting the pattern. For this purpose, the projection optical apparatus includes illuminating optical means for projecting an illuminating light to the pattern of the mask and light guide means for directing the illuminating light reflected by the pattern of the mask to a projection optical system. A mask adapted for use with the apparatus contains a pattern composed of two opaque areas which are different in reflectance from each other.

Projection optical apparatus and a photographic mask therefor

The invention provides a color image pickup device in which image light from a white object to be photographed or image light integrated by a diffusion plate or the like is incident on a pickup tube through an electrochromic element. Two primary color signals are separated from a video signal from the pickup tube, a voltage corresponding to a difference between the two primary color signals is detected by a differential amplifier, and the voltage is then applied across an electrochromic element. A spectral transmittance of which is then controlled, thereby achieving an optimal white balance.

Color image pickup device

A television camera equipped with an active filter section capable of producing dynamic special effects in the picture. The filter section of the camera includes an electro-optic light control device which is arranged in the optical path of the imaging optical section of the television camera such that its light transmittance for the incident light to the image screen of the camera is varied in response to the application of an electric signal, and the variable transmittance area is divided into a plurality of sections adapted to be controlled and drived selectively. Also, the camera includes a drive unit for selectively controlling and driving the sections of the electro-optic light control device so as to vary with time the spread of the area of the sections having the transmittance varied in response to the application of the electric signal.

Growing community of inventors

Kawasaki, Japan

Yoshio Mori