Mitsubishi Heavy Industries Limited

Mitsubishi Jukogyo Kabushiki Kaisha

Yoshio Kayumi

Shozo Kaneko

Tetsuro Shigemizu

Tadashi Gengo

Hisanobu Shinoda

Masayoshi Murata

Takashi Yamamoto

Joji Ichinari

Atsushi Takemura

Hiroshi Fujiyama

Masato Goto

The inverter device includes an inverse conversion circuit which converts a supplied direct-current electricity into a alternating-current electricity having a predetermined frequency, and is designed to drive a motor for a rotary machine, at various speeds, in which the switching control of the inverse conversion circuit is performed by a digital processor. In this inverter device, a timer interrupt process having an independent constant processing cycle which is not directly related to the processing cycle of the system control in the digital processor is assigned. In the timer interrupt process, whether or not switching of the inverse conversion circuit is required is determined, and the switching control is carried out on the basis of the determination.

Inverter device

The present invention is directed to a method for forming a thin film on a substrate by the use of a glow discharge plasma which comprises generating a magnetic field in a direction which crosses an electric field for discharge at right angles and fluctuating the magnetic field. The present invention is also directed to an apparatus for practicing the above method, which apparatus is composed of a reaction vessel, means for reducing the pressure in the reaction vessel and means for introducing the feed of reaction gases to the reaction vessel, electrodes for discharge disposed face to face in the reaction vessel, a power source from which a voltage for causing a glow discharge is fed to the electrodes for discharge, a coil surrounding the electrodes for discharge, for generating a magnetic field in a direction crossing at right angles to an electric field generated between the electrodes for discharge, and an AC power source for generating a magnetic field fed to the coil, whereby a thin film is formed on a base plate supported outside the range of the discharge electric field and in parallel with the direction of the electric field.

Method and apparatus for forming thin film

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Nagasaki, Japan

Yoshio Kayumi