Tocalo Co., Ltd.

Ebara Corporation

Tokyo Electron Limited

Onoda Cement Co., Ltd.

Other

Toyo Tanso Co., Ltd.

Toa Nekken Co., Ltd.

Tokyo Electron Co., Ltd.

Yoshio Harada

Junichi Takeuchi

Takema Teratani

Kenichiro Togoe

Kazumi Tani

Nobuyuki Nagayama

Kouji Mitsuhashi

Masamichi Kawasaki

Hisamichi Nagahara

Noriyuki Mifune

Tatsuo Suidzu

Tatsuya Hamaguchi

Hiroshi Hagiwara

Yoshihumi Kobayashi

Syuhei Nakahama

Tatsuo Suizu

Akira Nakahira

Masakazu Ikeda

Fujio Kushiki

Hatsuo Taira

Yoshiyuki Kobayashi

Tetsuro Tojo

Takahiro Murakami

Jiro Hiraiwa

Shuhei Nakahama

Koji Kuroda

Shinya Miki

Ryo Yamasaki

Keigo Kobayashi

Yakema Teratani

Takehico Morimoto

Yoshiko Harada

Shigeki Okunishi

Masakazu Okazaki

Hidetoshi Shin

Hirofumi Hisano

Morio Yokobori

Akio Shiratori

Tatsuyuki Kimura

Nobuyuki Tokyo Elect Yamanashi Co Ltd Nagayama

Kouji Tokyo Elect Yamanashi Co Ltd Mitsuhashi

[Problem] To provide a fluoride spray coating covered member adhered with a fluoride spray coating having excellent properties on quality by suppressing a thermal decomposition reaction and an oxide reaction, and to propose a method for forming a cover by firmly adhering the coating. [Solution] A method for forming a fluoride spray coating in an implantation structure onto a substrate surface by spraying particles of a fluoride spraying material onto a substrate surface or a pretreated substrate surface, if necessary through an undercoat layer or spray particle dotted parts of carbide cermet, at a flying velocity of particles of not less than 500 m/sec with an inert gas as a working gas for coating formation at an inert gas temperature of 600&#xb0; C.-1300&#xb0; C. as well as a fluoride spray coating covered member.

Method for forming fluoride spray coating and fluoride spray coating covered member

This invention is to provide a fluoride spray coating covered member having excellent resistance to halogen corrosion and resistance to plasma erosion and displaying identification symbols such as letters, numeric characters, graphic, pattern, firm name, serial number and so on. In the invention, one or more implanting gases selected from fluorine-containing gas, oxygen gas and inert gas are ion-implanted onto a white fluoride spray coating formed on a surface of a substrate, whereby at least a part of the surface of the white fluoride spray coating is changed into a black color to form a black ion-implanted layer.

Method for blackening white fluoride spray coating, and fluoride spray coating covered member having a blackened layer on its surface

For the purpose of solving problems inherent to a white AlOspray coating, i.e. drawbacks that the injury resistance, corrosion resistance, heat resistance, abrasion resistance and the like are poor and the light reflectance is high because the coating is porous and weak in the bonding force among particles, there are proposed a spray coating member having excellent injury resistance and the like in which a surface of a substrate is covered with a colored AlOspray coating of a luminosity lower than grayish white, achromatic or chromatic color.

Spray coating member having excellent injury resistance and so on and method for producing the same

A spray coated member having an excellent resistance to plasma erosion is produced by irradiating an electron beam to an outermost surface layer portion of a ceramic spray coated portion covering a surface of a substrate to form an electron beam irradiated layer.

Spray-coated member having an excellent resistance to plasma erosion and method of producing the same

Improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment. A ceramic coating member for a semiconductor processing apparatus comprises a porous layer made of an oxide of an element in Group IIIb of the Periodic Table coated directed or through an undercoat on the surface of the substrate of a metal or non-metal and a secondary recrystallized layer of the oxide formed on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.

Ceramic coating member for semiconductor processing apparatus

A member is obtained by forming a YOblack spray coating on a surface of a substrate or covering the surface of the substrate with a YOblack spray coating through an undercoat or a middle layer. This coating has good heat characteristics and is good in the resistance to damaging through a high hardness. The YOblack spray coating is produced by subjecting white YOpowdery material to a plasma spraying in an inert gas atmosphere containing substantially no oxygen or by forming a YOwhite spray coating and then irradiating an electron beam or a laser beam to this coating to melt at least a part of the white coating under heating to thereby smoothen denseness and blacken the surface of the coating.

[object Object]

A coating material for a thermal barrier coating having excellent corrosion resistance and heat resistance comprises a substrate, an undercoat made of an aluminum-containing heat-resistant alloy, CrOlayer as a middle layer on the undercoat, and a top coat made of ZrObased ceramic on the middle coat.

Coating material for thermal barrier coating having excellent corrosion resistance and heat resistance and method of producing the same

It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, AlOfilm formed on the undercoat as a middle layer and YOsprayed coating formed on the middle layer as a top coat.

Internal member for plasma-treating vessel and method of producing the same

A high-temperature strength member comprises a substrate of Ni-based single crystal alloy or a Ni-based unidirectional solidified alloy and a coating of a B-containing alloy having a specified B content formed on the surface thereof by a spraying process or a vapor deposition process.

High-temperature strength member

It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al O film formed on the undercoat as a middle layer and Y O sprayed coating formed on the middle layer as a top coat.

Plasma processing container internal member and production method thereof

It is to provide an electrostatic chuck member having a strong adsorption force and an excellent responsibility (release property) in the stop of voltage application and is an electrostatic chuck member comprising a substrate, an undercoat of a metallic layer formed on at least one surface thereof, a lower insulating layer of Al O ceramic formed on the undercoat, a metallic electrode layer formed on the lower insulating layer and an upper insulating layer of Al O ceramic formed on the electrode layer as a topcoat.

Electrostatic chuck member and method of producing the same

A member covered with a self-fluxing alloy sprayed coating is produced by previously forming a porous ceramic sprayed coating on a surface of a self-fluxing alloy sprayed coating prior to a refusing treatment of the coating formed on a substrate, heating the sprayed coating in an inert gas atmosphere controlled to 1&tilde;300 hPa or by a high frequency induction heating system and thereafter removing the ceramic sprayed coating to expose the self-fluxing alloy sprayed coating. This member is uniform in the thickness, less in the retention of pores or oxide impurities and has a strong coating property.

Method of production of self-fusing alloy spray coating member

In order to advantageously solve problems such as lowering of the productivity, contamination of alloy coating due to the adoption of different metal, increase of the cost due to the adoption of different coating process, a coating of MCrAlX alloy containing an oxide such as CoO, NiO or the like is directly formed at a thickness of 10&tilde;500 &mgr;m through a low pressure plasma spraying process containing substantially no oxide and thereafter the same MCrAlX alloy xontaining no oxide is applied thereonto at a thickness of 100&tilde;800 &mgr;m through a low pressure plasma spraying process in a non-oxidizing atmosphere to form a composite sprayed coating.

Spray coated member resistant to high temperature environment and method of production thereof

Growing community of inventors

Hyogo, Japan

Yoshio Harada