Mitsui Mining Co., Ltd.

Yoshinori Koyanagi

Keiichiro Koba

Takahisa Omata

Katsuya Eguchi

Toshio Hamasaki

Masaru Yanagimachi

Tosio Matsuuchi

Akria Mathumoto

This invention is concerned with ceramic substrates for multilayer interconnection. This invention is also concerned with a raw batch for ceramic substrates which require a calcining temperature as low as 1,000.degree. C. or lower upon their production, are low in dielectric constant and have a coefficient of thermal expansion close to that of silicon and also with a process for the production of the substrates. This invention makes use of a raw batch which permits the use of a low resistance conductor such as Ag-Pd, Ag, Au or Cu and also the production of substrates by low-temperature calcination. The raw batch contains borosilicate silicate glass powder, and aluminum borate powder and at a weight ratio of 40-80 percent to 20-60 percent. The raw batch can additionally contain one or more specific oxides in particular proportions.

Raw batches for ceramic substrates, substrates produced from the raw

Disclosed is a glass-ceramic product having a chemical composition, as expressed in terms of oxides with the exception of F, in the weight range of 35 to 60% SiO.sub.2, 10 to 20% Al.sub.2 O.sub.3, 12 to 25% MgO, 5 to 15% K.sub.2 O and 4 to 15% F, containing no B.sub.2 O.sub.3, and containing 40 to 70% by weight of fluorophlogopite microcrystals. This glass-ceramic product has a flexural strength of not less than 1500 kgf/cm.sup.2, a heat resistance of about 1100.degree. C., excellent dielectric properties and good machinability, and is a material capable of extending the range of use of high performance ceramics. The aforesaid glass-ceramic product can be made by dissolving, in a solvent consisting essentially of a polar solvent, compounds (consisting largely of alkoxide compounds) of the metallic components and a fluorine compound in such proportions as to give a final product having the aforesaid chemical composition, hydrolyzing these compounds, dehydrating and drying the resulting gel, and heat-treating the resulting dry solid.

Glass-ceramic product and method of making the same

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Tochigi, Japan

Yoshinori Koyanagi