Kabushiki Kaisha Nihon Micronics

Yoshinori Kikuchi

Akihisa Akahira

Hidehiro Kiyofuji

Toshiyuki Kudo

Takayuki Narumi

Takao Yasuta

Katsuji Hoshi

Yuji Miyagi

Kiyotoshi Miura

Katsushi Mikuni

Yoshiro Nakata

Yoshihito Onuma

Hideki Hirota

Hirose Fujita

To maintain the horizontalness of a probe card even, if the number of measured DUTs is increased. An electrical connecting apparatus according to the present, disclosure comprises a support member having a lower surface region in which a level part is formed and a wiring board provided adjacent to the lower surface of the support member, and to be connected to a testing device side. The electrical connecting apparatus comprises: a connection unit having multiple connection terminals; a probe substrate electrically connecting multiple probes to the connection terminals; multiple anchors arranged on the upper surface of the probe substrate; and multiple supports functioning as supports between corresponding ones of the anchors and the support member via the wiring board and the connection unit. The anchors and the supports are arranged at positions including: each vertex point of a square; each vertex point of two rectangles having respective two long sides passing through corresponding facing vertex points on one side and corresponding facing vertex points on the other side of the square; and multiple points along a virtual circle centered on the center of the square and having a diameter surrounding each of the rectangles.

Electrical connecting apparatus

The present invention provides a probe card holder including a plate-shaped frame formed with an opening approximately the same size as the probe card, a plurality of card bottom surface holding portions that are provided around a peripheral edge of the opening in the frame and that hold a bottom surface of the probe card while biasing the bottom surface, and a plurality of card top surface supporting portions that support the top surface of the probe card. Each card bottom surface holding portion includes an L-shaped member with a base portion and a bottom surface supporting portion, a knob that is linked to a tip end portion of the base portion and a biasing member that is disposed between the knob and the top surface of the frame and that biases the bottom surface supporting member upward toward the bottom surface of the frame.

Probe card holder

A probe card comes in touch with a test object to perform an inspection. The probe card contains: a probe substrate provided with a plurality of probes on the first surface and a plurality of anchor receiving portions on the second surface; and a supporting body disposed to support the periphery of the probe substrate, with at least a plurality of anchor receiving portions located within a probe existence region being arranged regularly and at an equal distance from each other on the second surface of the probe substrate.

Probe card and inspection device

Provided is a probe card capable of effectively placing electronic parts. A probe card according to the present invention includes a plurality of probes that come into contact with a plurality of electrodes of a device, a probe board including the plurality of probes provided thereon, a wiring board that is placed facing a surface of the probe board opposite to a surface including the probes provided thereon, a connector that includes a connection pin and a holder, in which the connection pin electrically connects a line of the probe board and a line of the wiring board, and the holder holds the connection pin between the probe board and the wiring board, and a first electronic part that is mounted on a probe board side surface of the wiring board and placed in a mounting space formed by a through hole or a recess provided in the holder.

Probe card and testing apparatus

An embodiment of an electrical connecting apparatus comprises a probe base plate and a plurality of contacts provided with tips to be pressed against electrodes of a device under test and arranged on the underside of the probe base plate. The distance dimensions from an imaginary plane parallel to the probe base plate to the tips of the contacts are made the greater toward the center of the probe base plate.

The object of the present invention is to prevent an operator from touching electronic elements arranged on an upper surface of a probe assembly of an electrical connecting apparatus at the time of carrying the electrical connecting apparatus and to restrict bowing of the probe assembly caused by the temperature difference between the upper surface and the lower surface of the probe assembly. An electrical connecting apparatuscomprises a probe assembly having a plurality of contactorson a lower surface and a plurality of electronic elementsarranged on an upper surface, a coverarranged on the upper surface of the probe assembly so as to close a spacein which the electronic elements are arranged, and two grippersattached to the cover. Each gripperhas one endand the other end, has a region ranging from one end to the other end formed approximately in a U-shape, and is attached to a main body portionof the cover at both the ends.

An electrical connecting apparatus comprising: a circuit board on which a reinforcing plate is mounted and a plurality of first electric connections are provided; a probe board on which second electric connections corresponding to the first electric connections are provided, with a plurality of probes electrically connected to the corresponding second electric connections; an elastic connector having plural pairs of both contacts capable of contacting the first and second electric connections corresponding to each other of both boards therebetween and receiving a biasing force in directions for both contacts to separate from each other; screw members for integrally combining them; and a spacer member for holding the probe tips substantially on the same plane by tightening of the screw members. Between the reinforcing plate and the probe board, a spacer plate is inserted for adjusting a distance from the other surface of the probe board to the probe tips.

Growing community of inventors

Hirosaki, Japan

Yoshinori Kikuchi