Tokyo Electron Limited

Yoshinobu Tanaka

Toshihisa Nozawa

Takaaki Matsuoka

Hirokazu Ueda

Yusuke Ohsawa

A silicon compound gas, an oxidizing gas, and a rare gas are supplied into a chamber () of a plasma processing apparatus (). A microwave is supplied into the chamber (), and a silicon oxide film is formed on a target substrate with plasma generated by the microwave. A partial pressure ratio of the rare gas is 10% or more of a total gas pressure of the silicon compound gas, the oxidizing gas, and the rare gas, and an effective flow ratio of the silicon compound gas and the oxidizing gas (oxidizing gas/silicon compound gas) is not less than 3 but not more than 11.

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Albany, NY, United States of America

Yoshinobu Tanaka