Alps Electric Co., Ltd.

Other

Yoshinobu Nakamura

Katsuya Kikuiri

Tetsuya Fukuda

Kiyoshi Sato

Hiroyuki Kobayashi

Kiyoharu Nakamura

Mitsuru Watanabe

Shigeaki Yamauchi

A package is mainly formed of a package body having a storage area for storing a pressure sensor, a capacity type pressure sensor stored in the storage area of the package body, a lid seals the package body in which the pressure sensor is stored, an adhesive agent for fixing the pressure sensor to the package body, and a bonding wire for electrically coupling a bonding pad of the pressure sensor and a conductive portion of the package body. An adhesive area of the package body and the pressure sensor is set to the area other than a projection area of the diaphragm of the pressure sensor on a mount bottom surface. This makes it possible to provide the package for the pressure sensor capable of detecting the pressure with high sensitivity although the gap between the substrate and the diaphragm has the value with the magnitude of several &#x3bc;ms.

Pressure sensor package structure

A pressure sensor includes a gold-silicon eutectic crystal layer interposed between the contact layer and the silicon substrate. Because the contact layer and the silicon substrate are electrically connected to each other by using a gold-silicon eutectic reaction at the time of bonding the silicon substrate and the glass substrate, a contact resistance between the contact layer and the silicon substrate can be stabilized, and a Q value of the sensor can be stabilized. In addition, since the contact layer and the silicon substrate are bonded to each other by the gold-silicon eutectic reaction, the bonding strength is sufficient.

Pressure sensor having gold-silicon eutectic crystal layer interposed between contact layer and silicon substrate

A capacitive pressure sensor is provided. The capacitive pressure sensor includes a glass substrate that has a pair of surfaces facing each other. A first silicon substrate has a fixed electrode passing through the glass substrate to be exposed at one surface and a projection passing through the glass substrate to be exposed at the one surface. A second silicon substrate is bonded to the one surface of the glass substrate and is disposed to face the fixed electrode so as to form a cavity between the second silicon substrate and the fixed electrode.

Capacitive pressure sensor

A capacitive pressure sensor and method of manufacturing the same is provided. The capactive pressure sensor includes a glass substrate that has a pair of surfaces opposite to each other. A recessed portion is provided to form a cavity on one of the pair of principal surfaces. A first protruding portion provided in the recessed portion. A first silicon substrate has a fixed electrode formed on the first protruding portion, and a movable electrode disposed with a predetermined interval between the fixed electrode and the movable electrode.

Capacitive pressure sensor and method of manufacturing the same

To provide a head blood flow balance inspecting apparatus for preventing apoplexy or brain infarct, a head blood flow balance inspecting apparatus comprising two ear interior thermometric portions, a connecting portion for connecting the two ear interior thermometric portions and a display portion for displaying a measurement result of the two ear interior thermometric portions. The right and left ears interior temperatures of the person to be inspected are measured and the measurement result is displayed on the display portion to accurately detect right and left blood flow balance of the head portion.

Head blood flow balance inspecting apparatus

A pulse diagnosis meter is provided to suitably carry out diagnosis and medicare in the case where the blood pressure and pulse pressure are imbalanced. Two blood pressure sensors having the same structure are provided for measuring simultaneously the blood pressure and the pulse pressure on the right and left side arms of a person to be examined. A processor is provided for affecting predetermined calculations. A display indicates the calculation result. It is possible to immediately know the state of the pulse pressure and the balance of the blood pressure values on the right and left, which would be likely to overlook only by the measurement of the blood pressure of one arm of the person to be examined.

Growing community of inventors

Niigata-ken, Japan

Yoshinobu Nakamura