Ulvac Cryogenics Inc.

Ulvac, Inc.

Yoshinobu Murayama

Junpei Yuyama

Shinji Furuya

Junichi Yasuda

Shunichi Sekiguchi

Hidetoshi Morimoto

Wenguan Piao

A cryopump includes a cryopanel, a main body, and a baffle plate. The cryopanel is connected to a refrigerator. The main body accommodates the cryopanel. The baffle plate is located in a gas inlet of the main body. The baffle plate includes a first portion and a second portion. The first portion includes a center of the baffle plate and a first hole extending through the baffle plate. The second portion includes an edge of the baffle plate and a second hole extending through the baffle plate. The second portion has a greater conductance than the first portion.

Cryopump and baffle plate for cryopump

The invention has an object to provide a regenerator and cryogenics pump using a regenerator material which fulfills such requirements as specific heat, thermal conductivity, manufacturing easiness, strength, hardness, chemical stabilization and low cost instead of Pb which is environmentally harmful. In a regeneratorwhich contains regenerator materialin an internal path for refrigerant, and in which heat is exchanged between the helium gas as refrigerant, and regenerator material, regenerator materialis any one of Sn, Bi&#x2014;Sn alloy and Ag&#x2014;Sn alloy. The regenerator materialis spherical. Plural spheres are packed in the internal path of the regenerator

Regenerator and cryogenics pump

Growing community of inventors

Chigasaki, Japan

Yoshinobu Murayama