Kabushiki Kaisha Toshiba

Ebara Corporation

Yoshinao Hirabayashi

Kenji Watanabe

Masahiro Hatakeyama

Tohru Satake

Takeshi Murakami

Yuichiro Yamazaki

Ichirota Nagahama

Nobuharu Noji

Nobuhara Noji

An apparatus capable of detecting defects of a pattern on a sample with high accuracy and reliability and at a high throughput, and a semiconductor manufacturing method using the same are provided. The electron beam apparatus is a mapping-projection-type electron beam apparatus for observing or evaluating a surface of the sample by irradiating the sample with a primary electron beam and forming on a detector an image of reflected electrons emitted from the sample. An electron impact-type detector such as an electron impact-type CCD or an electron impact-type TDI is used as the detector for detecting the reflected electrons. The reflected electrons are selectively detected from an energy difference between the reflected electrons and secondary electrons emitted from the sample. To eliminate charge-up caused on the sample surface by irradiation with the primary electron beam, the surface of the sample is covered with a cover placed above the sample and a gas is supplied to the space above the sample covered with the cover. The gas is brought into contact with the sample surface to reduce charge-up on the sample surface.

Mapping-projection-type electron beam apparatus for inspecting sample by using electrons emitted from the sample

Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample

Growing community of inventors

Matsumoto, Japan

Yoshinao Hirabayashi