Other

Hitachi Plant Engineering Construction Co., Ltd.

Yoshimitsu Kitada

Tadahiro Ohmi

Junichi Murota

Terutaka Sahara

Yutaka Hiratsuka

Masato Noda

Yoshio Fujisaki

A draft chamber is located within a clean room for sequentially immersing and processing carriers such as silicone wafers in a plurality of solution vessels provided in the draft chamber. In the draft chamber, a first air flow moves in a substantially horizontal direction from the front portion of the draft chamber toward the rear portion above the surfaces of solutions contained in chemical solution vessels which generate toxic gasses and a second air flow moves downward from the ceiling of the draft chamber. Thus, the toxic gasses generated from the chemical solution vessels are prevented from leaking into the clean room.

Draft chamber

Growing community of inventors

Chiyoda, Japan

Yoshimitsu Kitada