Otsuka Electronics Co., Ltd.

Yoshimi Sawamura

Kunikazu Taguchi

Naoki Inamoto

Shinji Fujimura

In an automatic optical measurement method according to the invention, with a movable reflection platemoved to place under an optical axis, light projected from a light projecting portionis received by a light receiving portionvia the movable reflection platea stationary reflection plateand the movable reflection platewhereas with the movable reflection platemoved away from the optical axis and a referenceset on a sample stagelight projected from the light projecting portionis received by the light receiving portionvia the referencewhereby a ratio between the intensities of the received lights is determined. During a sample measurement, light projected from the light projecting portionwith the movable reflection platemoved to place under the optical axis is received by the light receiving portionvia the movable reflection plate, stationary reflection plateand movable reflection plateso that the intensity of light thus received and the above ratio are used for estimating an intensity of light to be measured with the reference, the estimated intensity of light being used for correcting an intensity of light received via a sample.

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Kyoto, Japan

Yoshimi Sawamura