Disco Corporation

Yoshimasa Kojima

Atsushi Kubo

Satoshi Hanajima

Jun Nakama

Yusuke Kajihara

Shohei Sasaki

A positioning method includes detecting coordinates (X, Y) of a rotation center on a surface of a holding table with a first image capturing unit and stores the detected coordinates as a new first reference position, detecting coordinates (X, Y) of a rotation center on another surface of the holding table with a second image capturing unit and stores the detected coordinates as a new second reference position, calculating a first deviation between a previous rotation center on the surface of the holding table and the coordinates (X, Y), calculating a second deviation between a previous rotation center on the other surface of the holding table and the coordinates (X, Y), correcting a coordinate system of images captured by the first image capturing unit to eliminate the first deviation, and correcting a coordinate system of images captured by the second image capturing unit to eliminate the second deviation.

Positioning method

There is provided a method for executing processing for a workpiece. The method includes a table imaging step of imaging a foreign object of a transparent part of a holding table having the transparent part composed of a transparent member at least in part of a holding surface and forming a foreign object taken image, a holding step of holding the workpiece by the holding table after executing the table imaging step, a workpiece imaging step of imaging the workpiece held by the holding table through the transparent part and forming a workpiece taken image, and a processing step of executing cutting for the workpiece held by the holding table by a cutting unit.

Processing method and processing apparatus

A method of processing a workpiece includes holding a face side of the workpiece on a holding table having a region made of a transparent material and forming a processed groove in the workpiece with a cutting blade. The forming a processed groove includes capturing an image of the processed groove on a reverse side and the face side of the workpiece, and detecting whether a position of a first central line of the processed groove on the reverse side and a position of a second central line of the processed groove on the face side are in conformity in a predetermined plane. If the positions of the first and second central lines are not in conformity, then the forming a processed groove further has correcting a position of the center of the cutting blade in order to bring the positions of the first and second central lines into conformity.

Method of processing workpiece

A method of using a processing apparatus that includes a holding unit with a rotatable chuck table for holding a workpiece; a processing unit for processing the workpiece; a camera for imaging the workpiece that is movable in an indexing feed direction; and a control unit for controlling the components. The method includes forming a linear processed mark in the workpiece, and then moving the chuck table to an imaging zone, where the camera images the processed mark. The method further includes calculating correction values or a correction angle, and carrying out processing feed of the chuck table in the imaging zone under a condition in which the camera has been corrected in position in the Y-axis direction based on the correction values or the chuck table has been rotated by the correction angle.

Method of using a processing apparatus

A cutting apparatus includes a table including a support plate transparent in a visible region, a cutting unit, a first feeding mechanism that includes a first moving section for supporting the table and a first motor, a second feeding mechanism that includes a second moving section for supporting the cutting unit and a second motor, a first camera disposed on the side of a first surface of the support plate, a second camera disposed on the side of a second surface opposite to the first surface of the support plate, and a storage section that stores positional deviation amounts in the X-axis direction and the Y-axis direction between an imaging region at a reference position of the first camera and an imaging region at a reference position of the second camera.

Cutting apparatus

A processing apparatus includes a first imaging unit over a chuck table that images a back surface side of a workpiece, a second imaging unit under the chuck table that images a front surface side of the workpiece in a region corresponding to a region imaged by the first imaging unit, and a control part that inverts, in a predetermined direction, either a first image obtained by imaging of a processed groove on the back surface side by the first imaging unit or a second image obtained by imaging of the processed groove on the front surface side by the second imaging unit in such a manner that orientations of the first and second images correspond with each other, and that causes a display device to display both the processed groove in the first image and the processed groove in the second image that are superimposed.

Processing apparatus

A processing apparatus includes a chuck table, a first and second image capturing units, a display device, and a controller. The first image capturing unit obtains a first image group of images captured of a processed groove in the workpiece at different positions along a thicknesswise direction, each including a piece of first image information representing a shape of the processed groove. The second image capturing unit obtains a second image group of images captured of the processed groove at different positions along the thicknesswise direction of the workpiece, each including a piece of second image information representing a shape of the processed groove. The controller orders the pieces of at least either the first or the second image information into a sequence along the thicknesswise direction, thereby generating a three-dimensional image of the processed groove, and displays the three-dimensional image on the display device.

A processing apparatus includes a chuck table including a plate-shaped holding component having a predetermined region transparent from one surface to the other surface, a processing unit that processes a workpiece, a first imaging unit disposed over the chuck table to acquire a normal image of the back surface side, and a second imaging unit disposed under the chuck table to acquire a normal image of the front surface side, a display device, and a control part that executes image processing of the normal image of either the back or front surface side to cause the normal image subjected to the image processing to be displayed on the display device in the state of being inverted in a predetermined direction in order to allow the orientation of the normal image of the back surface side to correspond with the orientation of the normal image of the front surface side.

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Tokyo, Japan

Yoshimasa Kojima