Canon Kabushiki Kaisha

Yoshimasa Araki

Yutaka Mita

Noriyasu Hasegawa

Tsuyoshi Arai

Tohru Ishibashi

Yuichi Takahashi

Yasuyuki Tamura

Akio Saito

Makoto Shihoh

Yuichi Iwasaki

Nobuto Kawahara

Osamu Sato

Hiroyuki Ozaki

Yasuyuki Takanaka

Masatoshi Ikkatai

Koichi Kitakami

Toshiki Ito

Akihiro Mouri

Masataka Yashima

Hideki Matsumoto

Kyota Miyazaki

Hisashi Namba

Takahiro Sugiyama

Makoto Fukuhara

Shin-ichiro Takahama

Keita Sakai

Akiko Iimura

Noriyuki Chino

Kazumi Iwashita

Masahiro Kuri

Takashi Nakazawa

Kyoto Miyazaki

Kensuke Tone

An imprint apparatus includes: a movable housing unit; an ejection head provided in the housing unit and configured to eject an ejection material; a flexible member provided in the housing unit and separating the housing unit into a first storing space communicating with the ejection head and storing the ejection material and a second storing space storing hydraulic liquid; a first channel and a second channel communicating with the second storing space; a pressure control unit configured to control a pressure in the second storing space through the channels; and a bubble detection unit configured to detect bubbles in the channels.

Imprint apparatus and method of controlling imprint apparatus

A storage device stores an ejection cartridge including an accommodating container that accommodates an ejection material, and an ejection head that includes an ejection port for ejecting the ejection material accommodated in the accommodating container. The storage device includes a mount on which the ejection cartridge is mounted, and includes a pressure regulating tank configured to control a pressure of an inside of the accommodating container of the ejection cartridge fixed to the mount with its ejection port not enclosed.

Storage device, ejection-material ejection device, and imprint apparatus

An ejection-material ejection apparatus and an imprinting apparatus are provided which are capable of quickly detecting damage of a flexible membrane and avoiding contact between an ejection material and an operating liquid even if part of the flexible membrane is damaged. The flexible membrane includes a first film () covering a first storing space () for the ejection material, a second film () covering a second storing space () for the operating liquid, and an inter-film spacesituated between the first film () and the second film (). A change in state of the inter-film space () resulting from communication between at least one of the first storing space () and the second storing space () and the inter-film space () is detected with a liquid sensor (), a flow speed sensor (), and a liquid leakage sensor ().

Ejection-material ejection apparatus and imprinting apparatus

An ejection material filling device fills an ejection material into a first storage space of an ejection material ejecting device including an ejection head configured to eject the ejection material and a storage container having an internal space separated by flexible membrane into the first storage space storing the ejection material and a second storage space storing a hydraulic fluid. The ejection material filling device includes an ejection material server bottle storing the ejection material to be filled into the first storage space, pipes configured to form a circulation path including the ejection material server bottle and the first storage space, a pump configured to circulate the ejection material through the circulation path, and a particle filter provided in the circulation path.

Ejection material filling device, pressure regulation device, and ejection material filling method

An ejection device includes: an ejection unit provided with an ejection port configured to eject an ejection material; a piezoelectric element configured to cause the ejection material to be ejected from the ejection unit; a first liquid chamber connected to the ejection unit and configured to supply the ejection unit with the ejection material; a pressure control unit configured to control a pressure in the ejection unit by controlling a pressure in the first liquid chamber; and a detection unit configured to detect a wetness of an ejection port side surface.

Ejection device, imprint apparatus, and detection method

A liquid ejection device includes a storage section storing a nanoimprinting liquid and also includes an ejection port which communicates with the storage section and which ejects the nanoimprinting liquid. The storage section contains a sorption medium that adsorbs or absorbs at least one selected from the group consisting of particles, metal ions, and water. The sorption tedium is not ejected from the ejection port when the nanoimprinting liquid is ejected from the ejection port.

Liquid ejection device, nanoimprinting apparatus, nanoimprinting liquid storage tank, method of manufacturing cured product pattern, method of manufacturing optical component, method of manufacturing circuit board, and method of manufacturing imprinting mold

A liquid discharge apparatus comprises a head including a discharge port surface, a first reservoir that stores the liquid to be supplied to the head, a flexible member, separating an inner space of the first reservoir into a first chamber that stores the liquid and a second chamber that stores an operation liquid, a second reservoir communicating with the second chamber, the second reservoir storing the operation liquid to be supplied to the second chamber, the second reservoir being disposed in such a manner that a liquid surface of the operation liquid stored in the second reservoir is positioned below the discharge port surface, and an adjustment unit that performs adjustment in such a manner that a position of the liquid surface of the operation liquid in the second reservoir falls within a predetermined range in a state where the second reservoir is opened to atmosphere.

Liquid discharge apparatus, imprint apparatus and part manufacturing method

A fluid containing member includes a first containing chamber that contains a first fluid, and a second containing chamber that contains a second fluid. The first containing chamber and the second containing chamber are separated from each other by a first separation film on a side of the first containing chamber and a second separation film on a side of the second containing chamber. The first separation film and the second separation film are partly connected to each other or partly contact each other so as to move together in accordance with a change in an internal pressure of the first containing chamber or an internal pressure of the second containing chamber.

Fluid containing member

There is provided an ejection material receiving unit capable of increasing the filling amount of ejection material with as little enlargement of the container itself as possible and an ejection material ejecting apparatus including the unit. Therefore, an ejection material receiving unit includes: a first receiving space capable of receiving ejection material; a second receiving space capable of receiving liquid; and a flexible member separating the first receiving space and the second receiving space, and is characterized in that the flexible member has a concave part which takes a concave shape in a state where the first receiving space is not filled with the ejection material and the second receiving space is not filled with the liquid, and the concave shape is a shape dented toward the second receiving space from the first receiving space, and is also a shape conforming to a wall forming the second receiving space.

Ejection material receiving unit, ejection material ejecting apparatus, and manufacturing method of flexible member

Provided is a liquid discharge apparatus, including: a head having an discharge port surface in which an discharge port array is provided, the discharge port array including a plurality of discharge ports which discharges liquid and is arranged along a first direction; a suction port performing a suction operation for the discharge port surface; and a control unit causing the suction port to move in a second direction intersecting the first direction under a state in which the suction port is spaced away from the discharge port surface.

Liquid discharge apparatus, imprint apparatus, and method of manufacturing a component

Provided is a liquid discharging apparatus, including: a head having a discharging port surface on which discharging ports are formed, and configured to perform a discharging operation for discharging liquid through the discharging ports; a suction port configured to perform a suction operation for the discharging port surface; a pressure changing unit configured to change a pressure in the head; and a control unit configured to perform the suction operation under a state in which the pressure changing unit has changed the pressure in the head in a positive pressure direction with respect to a pressure that is set during the discharging operation and the suction port is spaced away from the discharging port surface.

Liquid discharging apparatus, imprint apparatus, and method of manufacturing a component

A liquid discharge apparatus includes: a container divided into a first chamber and a second chamber by a dividing member, the first chamber including a discharge outlet that discharges a liquid and configured to contain the liquid, the second chamber configured to contain a fluid; a tank configured to store the fluid; a connecting portion that provides fluid communication between the tank and the second chamber; a measurement unit configured to measure an amount of the fluid supplied from the tank to the second chamber; and a controller configured to obtain an amount of the liquid contained in the first chamber based on a measurement result from the measurement unit.

Liquid discharge apparatus, imprint apparatus, and article manufacturing method

A liquid discharge apparatus comprises a head having a discharge port surface on which a discharge port is provided for discharging a liquid, and a liquid moving unit arranged apart from the discharge port surface and configured to be movable along the discharge port surface, wherein, the liquid moving unit moves a liquid on the discharge port surface to a collection position in which the discharge port is not provided, with a moving of the liquid moving unit.

Liquid discharge apparatus and method for controlling the same

There is provided a liquid ejection device including a head for ejecting a liquid, a liquid containing unit, a liquid filler, and a pressure adjusting unit, in which the liquid containing unit includes a sealed housing and a flexible member provided in the housing, the housing includes a first containing space communicating with the head and a second containing space partitioned from the first containing space through use of the flexible member, the first containing space contains the liquid, and the liquid filler is filled into the second containing space, the pressure adjusting unit communicates with the second containing space, and adjusts the pressure of the liquid filler filled into the second containing space so as to maintain a negative pressure with respect to the head.

Growing community of inventors

Utsunomiya, Japan

Yoshimasa Araki