Yamaha Corporation

Shizuoka University

Yoshiki Terada

Atsuo Hattori

Shuichi Sawada

Katsunori Suzuki

Koji Yataka

Masahiro Sugiura

Shingo Sakakibara

Yoku Inoue

Yasuro Okumiya

A strain sensor includes a flexible substrate, a CNT film made of a plurality of CNT fibers aligned in an orientation direction, a pair of electrodes, and a protective coat. The electrodes are formed at the opposite ends of the CNT film in a perpendicular direction to the orientation direction of the CNT fibers. The protective coat protecting the CNT film is made of a resin, a water-based emulsion, or an oil-based emulsion. The protective coat is placed in contact with at least part of the CTN fibers on the surface of the CNT film. The strain sensor including the protective coat is able to prevent damage/breakage of the CNT film and to prevent foreign matters from entering into gaps between CNT fibers, thus improving durability in maintaining adequate sensing functionality.

Flexible strained sensor with protective coating

A probe unit to be fixed to a probe device for testing functions of a test body. The probe unit includes: a substrate; probe pins formed on the substrate by lithography, the probe pins having distal ends protruded from the substrate and being made in contact with electrodes of the test body; and a positioning member formed on the substrate by lithography at a predetermined position relative to the probe pins, the positioning means abutting upon a member for positioning the substrate relative to the probe device.

Probe unit and its manufacture

A probe unit has a plurality of metal leads regularly juxtaposed on the surface of a substrate. Each metal lead has a resilient contact piece in a front portion of the lead, the resilient contact piece being spaced apart from the substrate surface or extending over an edge of the substrate. The cross sectional shape of the resilient contact piece is an arc shape and/or has a projection near at the distal end of the resilient contact piece.

Probe unit having resilient metal leads

Growing community of inventors

Hamamatsu, Japan

Yoshiki Terada