Sii Nanotechnology Inc.

Hitachi High-tech Science Corporation

Seiko Instruments Inc

Yoshiki Matoba

Takayuki Fukai

Masahiro Sakuta

Kiyoshi Hasegawa

Yutaka Ikku

Masanori Takahashi

Koichi Tamura

Akihiro Takeda

Noriaki Sakai

Mitsuo Naito

Shin Okawa

Yuta Urano

Haruo Takahashi

Rintaro Nakatani

Kaifeng Zhang

Ryusuke Hirose

Kanji Nagasawa

Toshitada Takeuchi

Toshiyuki Takahara

Tsuneo Sato

Shingo Tsuboi

Toshihiro Sakai

Kazuhiko Kimura

Hiroaki Nohara

An X-ray transmission inspection apparatus includes an X-ray source for irradiating a sample with X-rays, a two-dimensional sensor for detecting transmission X-rays passing through the sample, a sample moving mechanism for moving the sample, a calculation unit for processing an image of the transmission X-rays detected by the two-dimensional sensor, and a display unit for displaying a cross-sectional image. When Vis a speed at which the sample moves, F is a frame rate of the two-dimensional sensor, A is a sample pitch of the two-dimensional sensor, and LS is a distance between the X-ray source and the two-dimensional sensor, the calculation unit creates a cross-sectional image taken at a distance L from the X-ray source by adding the images of the pixels positioned at an interval of [(LS&#xd7;V)/(L&#xd7;F&#xd7;A)] in a direction in which the sample moves.

X-ray transmission inspection apparatus and X-ray transmission inspection method

Disclosed is a mass analysis apparatus and method, wherein the precision of detection of a first material including a second material is improved, without enlarging the apparatus, and the measurement time is reduced. The mass analysis apparatus for analyzing a sample containing a first material including an organic compound and at least one second material including an organic compound and having a mass spectrum peak overlapping that of the first material includes a peak correction unit, wherein, when an intensity ratio (peak B)/(peak A) of peak A, not overlapping that of the first material, and peak B, overlapping that of the first material, is a correction coefficient (W), an intensity of a net peak D of the mass spectrum of the first material is calculated by subtracting W&#xd7;(intensity of peak A) from an intensity of a peak C of the mass spectrum of the first material in the sample.

Mass analysis apparatus and method

Detection can be performed even for a thick inspection target object through time delay integration without degradation of spatial resolution. There is provided an X-ray inspection device configured to include: an X-ray source that generates X-rays; a transport unit that performs transporting a sample; a detecting unit that has a time delay integration type detector which detects X-rays generated by the X-ray source and transmitted through the sample transported by the transport unit; and a defect determining unit that processes a signal obtained by detecting the X-rays transmitted through the sample by the time delay integration type detector of the detecting unit and determines a defect in the sample. The transport unit performs transporting the sample while causing the sample to rotate in synchronization with the transporting when the sample passes in front of the time delay integration type detector of the detecting unit.

X-ray inspection method and X-ray inspection device

Disclosed is an apparatus for and a method of mass analysis, the apparatus and the method being capable of improving a detection accuracy of a target substance including impurities, without increasing a size of the apparatus, and shortening measuring time. The apparatus analyzing a sample containing a target substance and one or more interfering substances, which have a peak of a mass spectrum overlapping that of the target substance includes: a peak correction unit calculating an intensity of net peak D of the mass spectrum of the target substance by subtracting a total sum of estimated intensities of the peak B, which are calculated every predetermined time interval according to the intensity of the peak A and a nonlinear relation F between the peak A and the peak B, from an intensity of peak C of a mass spectrum of the target substance of the sample.

Apparatus for and method of mass analysis

Disclosed are an X-ray transmission inspection apparatus and an inspection method using the same that are capable of preventing over-detection and erroneous detection of foreign matter even when variations in vertical position of the sample occur. The X-ray transmission inspection apparatus includes: an X-ray source () irradiating a sample with X-rays; a sample moving device () moving the sample S continuously to a predetermined direction while X-rays X are emitted from the X-ray source; a time delay integration sensor (TDI sensor) () provided opposed to the X-ray source based on the sample, and detecting the X-rays transmitted through the sample; a distance sensor () measuring a distance between the X-ray source and the sample; and a TDI controller () controlling the TDI sensor by changing a charge transfer speed of the TDI sensor () in real time based on variations in the distance measured by the distance sensor.

X-ray transmission inspection apparatus and inspection method using the same

An X-ray transmission inspection apparatus includes: an X-ray source configured to irradiate a sample with an X-ray; a detector configured to be disposed on a side opposite to the X-ray source with respect to the sample and to detect the X-ray which is transmitted through the sample using a phosphor; a shield member configured to be arranged to face a detection surface of the detector and to block a part of X-rays to partially form a shield area from the X-rays on the detection surface; and a shield moving mechanism configured to move the shield member relative to the detector to enable change of a position of the shield area.

X-ray transmission inspection apparatus

An X-ray fluorescence spectrometer includes: an X-ray source which irradiates a sample with primary X-rays; a light condensing device which condenses the primary X-rays to reduce an irradiation area on the sample; a detector which detects fluorescent X-rays produced from the sample irradiated with the primary X-rays; a housing which accommodates the X-ray source and the light condensing device; a temperature sensor which is disposed in at least one of the X-ray source and the periphery of the X-ray source; at least one external-air fan which is disposed on the housing, and which can exchange internal air with external air; and a control section which drives the external-air fan based on temperature information detected by the temperature sensor, to adjust the ambient temperature around the X-ray source to a constant temperature.

X-ray fluorescence spectrometer comprising a temperature sensor, two external-air fans, and a circulation fan

An X-ray fluorescence spectrometer includes: a sample stage configured to place a sample thereon; an X-ray source configured to irradiate the sample with primary X-rays; a detector, which is configured to detect fluorescent X-rays produced from the sample irradiated with the primary X-rays, and which includes an X-ray incident window formed by a window material through which fluorescent X-rays is transmittable; and a gas blowing mechanism configured to blow a gas to at least one of an outer surface of the X-ray incident window and the sample stage.

X-ray fluorescence spectrometer comprising a gas blowing mechanism

A foreign matter detector includes an X-ray source which irradiates a sample moving in a constant direction with primary X-rays, a parallel two-dimensional slit which includes a plurality of slits arranged in at least a moving direction of the sample and emits parallel secondary X-rays by extracting a parallel component of secondary X-rays generated from the sample, a dispersing element which disperses the parallel secondary X-rays to obtain a specific X-ray fluorescence, a TDI sensor which receives the X-ray fluorescence, and a control unit which controls the TDI sensor to detect a foreign matter corresponding to the X-ray fluorescence. The control unit integrates a luminance value of the X-ray fluorescence received by the TDI sensor while matching a direction and a speed of charge transfer of the TDI sensor to a direction and a speed of movement of the sample.

Foreign matter detector

An X-ray fluorescence analyzer includes a sample stage having an opening at an X-ray irradiation position, an X-ray source which irradiates a sample placed on the opening with a primary X-ray from below, a detector which detects an X-ray fluorescence generated from the sample, a transparent drop prevention plate supported to be advanced and retracted immediately below the opening, a drive mechanism which advances and retracts the drop prevention plate, an observation camera which observes the drop prevention plate positioned immediately below the opening, and an operation unit which processes an image of the drop prevention plate which is captured by the observation camera. The operation unit detects a foreign matter on the drop prevention plate based on an image difference between images before and after the drive mechanism moves or vibrates the drop prevention plate within an observation range of the observation camera.

X-ray fluorescence analyzer

A transmission X-ray analyzer () for detecting a transmission X-ray image of a sample () that is continuous in a band shape includes: a TDI sensor (); an X-ray source () arranged opposed to a TDI sensor; a pair of support rollers () arranged away from the TDI sensor between the TDI sensor and the X-ray source, the pair of support rollers being configured to transport the sample to a detection position of the TDI sensor while keeping a constant interval between the TDI sensor and the sample; and a pair of outside rollers () arranged respectively on an outer side of the pair of support rollers in a transportation direction (L). One of the pair of support rollers and one of the pair of outside rollers are arranged at different positions as to apply a tension to the sample between the pair of support rollers.

Transmission X-ray analyzer

A transmission X-ray analyzer for detecting a transmission X-ray image of a sample that moves relatively in a predetermined scanning direction includes; a time delay and integration (TDI) sensor including a plurality of stages of line sensors including the plurality of two-dimensionally arranged image pickup devices arranged in a direction perpendicular to the predetermined scanning direction, being configured to transfer charge accumulated in one line sensor to an adjacent subsequent line sensor; a shield unit for shielding a part of the image of light entering the TDI sensor by moving back and forth in the predetermined scanning direction, the shield unit being disposed between the TDI sensor and the sample; and a shield unit position control unit for controlling a position of the shield unit so as to shield a predetermined number of stages of line sensors among the plurality of stages of line sensors.

Transmission X-ray analyzer and transmission X-ray analysis method

An X-ray analyzer includes a transmission X-ray inspecting portion having a first X-ray source and a transmission X-ray detector for detecting a transmission X-ray that passed through a sample from the first X-ray source, and a fluorescent X-ray inspecting portion having a second X-ray source and a fluorescent X-ray detector for detecting a fluorescent X-ray output from the sample when the sample is irradiated with an X-ray from the second X-ray source. A movement mechanism moves a sample stage that supports the sample. A foreign matter position calculating unit calculates a position of foreign matter in the sample, and a movement mechanism control unit controls the movement mechanism so that the position of the foreign matter calculated by the foreign matter position calculating unit coincides with an optical axis of the second X-ray source.

X-ray analyzer and X-ray analysis method

To prevent erroneous detection in detecting a foreign matter, which is caused by a change in distance between a sample and an X-ray detector, provided is an X-ray transmission inspection apparatus including an X-ray tube () that irradiates an inspection sample element with an X-ray, an X-ray detector () that detects a transmission X-ray when the X-ray is transmitted through a sample, an operation portion () that obtains a contrast image from a transmission image of a transmission X-ray, a sensor that calculates a distance between the sample and the detector, and a mechanism that adjusts the position of the X-ray detector, in which an X-ray transmission image is picked up while the distance between the sample and the X-ray detector is kept constant.

Growing community of inventors

Chiba, Japan

Yoshiki Matoba