Kawasaki Jukogyo Kabushiki Kaisha

Yoshiki Maeda

Ippei Shimizu

Takeshi Shibata

A robot hand to hold a substrate, which includes a base body, a blade defining a holding position for holding the substrate and attached at a base part to the base body, and a differential screw having a center axis perpendicular to a principal surface of the substrate existing at the holding position and configured to attach the base part of the blade to the base body. The differential screw includes a first threaded part having a first pitch, a second threaded part having a second pitch different from the first pitch, and an intervening member coaxially having a third threaded part to be threadedly engaged with the first threaded part, and a fourth threaded part to be threadedly engaged with the second threaded part. The first threaded part is provided to the base body, and the second threaded part is provided to the base part of the blade.

Robot hand, robot and fixing device

Blades, base parts to which the blades are fixed, a guide mechanism configured to guide movement of the base parts in a direction in which the base parts are arranged side by side, and a linkage mechanism configured to parallelly change intervals of the base parts according to angle changes of link members coupled to the base parts, are included. An interval fine-adjustment mechanism is provided at each of coupling parts between the base pars and the link members, the interval fine-adjustment mechanism being configured to finely adjust positions of the base parts in the direction in which the base parts are arranged side by side, individually. According to this, a blade interval adjusting device capable of finely adjusting the intervals of the blades which transfer wafers etc., is provided.

Blade interval adjusting device

At least three spherical surface sliding bearings provided between a first member and a second member and disposed at mutually different positions when seen in the height direction, are provided. Each of the at least three spherical surface sliding bearings has an inner ring and an outer ring, either one of the inner ring and the outer ring is attached to the first member, and the other is attached to the second member. In at least two of the at least three spherical surface sliding bearings, the height adjustment mechanism intervenes, at least either one of between one of the inner ring and the outer ring, and the first member, and between the other and the second member.

Inclination adjusting device and robot provided with the same

An in-vacuum twin-arm robot transports substrates in a vacuum space. The in-vacuum twin-arm robot includes a base arm, a first arm, a second arm, a first hand, and a second hand. The base arm can move vertically and can rotate. The first arm can rotate with respect to the base arm. The second arm can rotate with respect to the base arm. The first hand rotates with respect to the first arm and holds and transports the substrate. The second hand rotates with respect to the second arm and holds and transports the substrate. The first arm and the second arm are rotatably mounted on a leading end of the base arm via a joint shaft formed hollow. An angle of the first hand with respect to the first arm and an angle of the second hand with respect to the second arm can be changed independently of each other.

Growing community of inventors

Kobe, Japan

Yoshiki Maeda