Intermolecular, Inc.

Yoshiki Ashizawa

Heng-Cheng Pai

Patrick Ngatchou

Kurt H Weiner

John M Schmidt

Yoram Schwarz

Heng-Cheng Pal

A combinatorial processing management system is described, including determining an identification for a substrate, retrieving data from tools operating on the substrate, generating an analysis of the data in response to the retrieving, and storing the data and the analysis in a database indexed by the identification. The analysis may include comparisons between multiple processes performed on multiple regions of the substrate. The multiple processes may process at least one region of the substrate differently from at least one other region of the substrate.

Combinatorial processing management system

A test management system is provided that performs tests on integrated circuit test structures. A server may be used to distribute a test recipe to multiple test cells. Each test cell may have multiple test instruments and associated instrument drivers. When performing a test, a test type module may run on a given test cell. The test type module may perform tests by using the instrument drivers to control the test instruments available in the test cell. Users may make test option selections using graphical interface screens such as a test recipe setup screen and a platform engine control screen. A user can select test sites for testing based on which process parameters where used to fabricate the test structures associated with the test sites or other criteria.

Test management system

A method to graphically create a recipe for processing a substrate includes displaying graphical images that present processing operations to be performed on the substrate, allowing a user to set properties of the processing operations by manipulating the graphical images, and generating the recipe based on the properties of the processing operations set by the user and synchronizing the plurality of processing operations based on the properties. The graphical images may be time-bars in a Gantt-like chart that allows the user to see the sequence, the timing, and the durations of the processing operations.

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Pleasanton, CA, United States of America

Yoshiki Ashizawa