Fujitsu Corporation

Yoshikazu Kakinoki

Masato Nakashima

Tetsuo Koezuka

Moritoshi Ando

Hiroyuki Tsukahara

Yoshitaka Oshima

Kikuo Mita

Noriyuki Hiraoka

Shinji Hashinami

Yoshinori Suto

An optical system for detecting the shape of a three-dimensional object comprising a collimating lens for converting a laser beam to a parallel beam of light, a scanning optical system which moves the parallel beam incident on the object in a direction normal to the object thereby to scan the object with a scanning beam, a mirror which is located in the vicinity of the scanning beam at a predetermined inclination angle with respect to the object, to reflect the beam reflected by the object in a predetermined direction as a reflection beam, an image forming lens which converges the reflection beam to a point and thereby producing an image of the object, and a first optical detector located at the point at which the reflection beam is converged to detect the converged beam spot.

Optical system for detecting three-dimensional shape

In inspecting plated through holes in printed circuit boards, light from a light source is introduced into the light conducting substrate of the printed circuit boards having through holes. A light detector senses the light in the holes. The detected through holes are masked to prevent the light from entering the through hole of the substrate. A light detector senses light leaked to the hole. By signals supplied from the light detectors, the plated through holes can be continuously and efficiently inspected.

Method and apparatus for inspecting plated through holes in printed

Growing community of inventors

Machida, Japan

Yoshikazu Kakinoki