Dainippon Screen Mfg. Co., Ltd.

Yoshikazu Kago

Takahide Hirawa

Akiyoshi Nakano

Hiroyuki Ueno

Koichi Mukaegaki

Hitoshi Matsuda

Akira Hikita

The present invention provides a substrate treatment apparatus for performing a substrate periphery cleaning process. The substrate treatment apparatus includes substrate holding mechanism which holds a substrate, a brush having a cleaning surface inclined with respect to a longitudinal axis thereof extending perpendicularly to a front surface of the substrate held by the substrate holding mechanism, brush moving mechanism which moves the brush along the longitudinal axis and along a lateral axis orthogonal to the longitudinal axis, load detecting unit which detects a load applied along the longitudinal axis to the brush, and first judging unit which judges, based on an output of the load detecting unit, whether or not the brush is located at a reference position serving as a reference for guiding the brush to a treatment position at which the brush is located in the cleaning process.

Substrate treatment apparatus

A priority grade is provided to each of several graphic figures. Respective contour lines of the graphic figures are classified into two groups according to respective locations. Respective contour lines in the two groups are serially selected in a descending order of main scanning coordinate values, and are compared with each other to specify a cross point having the largest coordinate value within a selected pair of cross points. A component of the raster data is generated on the basis of the selected cross point when a priority grade of the selected cross point satisfies a predetermined condition in connection with respective priority grades of the other cross points.

Method of generating raster data useful in reproducing a multitone image

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Kyoto, Japan

Yoshikazu Kago