Cymer, Inc.

Asml Netherlands B.v.

Yoshiho Amada

Richard G Morton

Richard C Ujazdowski

Thomas D Steiger

Bryan George Moosman

James A Carmichael

William N Partlo

Richard L Sandstrom

Daniel J W Brown

Richard M Ness

Georgiy Olegovich Vaschenko

Yezheng Tao

Walter Dale Gillespie

Timothy S Dyer

Alexander Anthony Schafgans

Bob Rollinger

Fedor Trintchouk

Curtis L Rettig

Joshua Mark Lukens

Brian Strate

Daniel James Golich

Michael David Caudill

Brian D Strate

Fedor B Trintchouk

Bryan G Moosman

An apparatus includes: a tube; a body including: a first body wall and a second body wall; and a support structure including: a first support portion and a second support portion. The first body wall extends in a first direction, the second body wall extends in a second direction that is different than the first direction, a first portion of the tube passes through an opening in the second body wall the first support portion is configured to attach to the first body wall, and a second portion of the tube is configured to pass through the second support portion when the first support portion is attached to the first body wall. An interior of the tube and an interior of the body are configured to receive molten target material, and the target material emits extreme ultraviolet (EUV) light when in a plasma state.

Nozzle apparatus

A system for an extreme ultraviolet (EUV) light source includes an optical amplifier including a gain medium positioned on a beam path, the optical amplifier configured to receive a light beam at an input and to emit an output light beam for an EUV light source at an output; a feedback system that measures a property of the output light beam and produces a feedback signal based on the measured property; and an adaptive optic positioned in the beam path and configured to receive the feedback signal and to adjust a property of the output light beam in response to the feedback signal.

Adaptive laser system for an extreme ultraviolet light source

A cross-flow fan impeller for circulating gas in a transversely excited, pulsed, gas discharge laser is disclosed and may comprise a plurality of hubs, the hubs spaced apart along the impeller's rotation axis and establishing at least two impeller segments wherein a first segment has an output flow within 80-120% of a second segment and the first and second segment having differing blade pass frequencies. In some embodiments of this aspect, the first segment may have n number of blades the second segment m number of blades, and m&#x2260;n. In one embodiment, the impeller may be configured with n=29 and m=23 and in another embodiment, the impeller may be configured with n=23 and m=19. The impeller may be configured wherein n and m are prime numbers.

Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser

A method for making a metal fluoride trap including: assembling a precipitation tube assembly including a plurality of precipitation tubes supported between a first tube end support and a second tube end support; assembling a precipitation tube, flowsheet and filter media assembly including: wrapping a flowsheet around at least one full circumference of the plurality of precipitation tubes, wherein the flowsheet has a width less than a length of the plurality of precipitation tubes between the first tube end support and the second tube end support; and wrapping a filter media around the wrapped flowsheet, wherein the filter media and the flowsheet are wrapped so as to have a diameter less than an inner diameter of an outer casing of the metal fluoride trap; inserting the precipitation tube, flowsheet and filter media assembly into the outer casing of the metal fluoride trap; allowing the flowsheet to expand; and pressing the filter media between the flowsheet and an inner surface of the outer casing of the metal fluoride trap. A method of filtering gas in a metal fluoride trap is also disclosed. A metal fluoride trap apparatus is also disclosed.

Metal fluoride trap

A apparatus and method are disclosed which may comprise a fluorine gas discharge laser system and electrode support system which may comprise a first electrode electrically connected to a source of high voltage; a first insulating mechanism insulating the first electrode from ground; a second electrode electrically insulated from the source of high voltage and together with the first electrode forming an elongated discharge region between portions of the first and second electrodes respectively extending along a longitudinal axis of each of the first and second electrodes, defining electrode discharge receiving region end portions; a plurality of current return tines electrically connected to the second electrode and to ground, the tines distributed along the longitudinal extent of the elongated discharge region; a second insulating mechanism electrically isolating the second electrode from ground except through the plurality of current return tines.

Gas discharge laser system electrodes and power supply for delivering electrical energy to same

A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial jitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.

Gas discharge laser chamber improvements

A laser and method for operating a laser and disclosed. The laser may include a first discharge electrode and a second discharge electrode positioned at a distance from the first electrode. A laserable gas may be provided together with a circulation system to flow the gas into a space between the electrodes. A voltage source may be connected to the electrodes for creating a discharge in the space; and a flow guide having a guide surface in contact with the gas may be provided that is guide selectively moveable relative to the first electrode to guide a flow of gas into the space. In one implementation, the flow guide directs flow toward an extremity of the first electrode and is adjustable to direct flow toward the extremity as the first electrode wears.

Adjustable flow guide to accommodate electrode erosion in a gas discharge laser

Growing community of inventors

San Diego, CA, United States of America

Yoshiho Amada