Namiki Seimitsu Houseki Kabushiki Kaisha

Yoshihito Hiyama

Nobuo Imaizumi

Kazuya Nakamura

Hiroshi Goto

Ryutaro Maeda

There is provided a nanoimprint apparatus. The nanoimprint apparatus transfers a pattern formed on a surface of a mold to a transfer layer which is formed partially or entirely on a side surface of a substantially cylindrical or columnar substrate. The nanoimprint apparatus includes: a first jig which is in contact with the substrate; a second jig which rotatably supports the first jig; a press unit which is connected to the second jig to press the substrate on the moldthrough the first and second jigs; and a movable holding unit which holds the mold and moves the moldin a direction substantially perpendicular to a pressing force.

Nanoimprint method and apparatus

A high-precision cylindrical coil having a high-precision fine coil pattern and a high mechanical precision such as fine roundness and no axial runout, and a cylindrical micrometer using the cylindrical coil are provided. In a cylindrical coil, a plurality of layers of coil patterns formed by filling the coil pattern grooves formed on a cylindrical substrate with a conductor and a plurality of insulating layers coating the cylindrical substrate are formed, the layers of coil patterns are electrically interconnected to each other by filling a through-hole formed by performing a hole forming process with a conductor, and the outmost layer is made of an insulating material.

Growing community of inventors

Aomori, Japan

Yoshihito Hiyama