Other

Sony Corporation

Yoshihisa Miura

Yuichi Aki

Jun Sasaki

Setsuo Norioka

Naoki Date

Masanobu Yamamoto

Mitsuru Koizumi

Katsumi Sekine

Hiroshi Kawase

Toshiaki Miyokawa

Gakuo Komatsubara

A detection apparatus, a detection method and an electron beam irradiation apparatus for detecting deflection electrons in order to precisely focus even if a vacuum seal valve is provided. An electron beam irradiation apparatus including a vacuum seal valve mechanism which is provided in a static pressure floating pad, and opens/closes an electron beam passage with a piston so as to switch between an electron beam irradiation state and a vacuum seal state, and a deflection electron detector which is provided between the vacuum seal valve mechanism and a master disk and detects a deflection electron signal generated from the master disk with electron beam irradiation.

Detection apparatus, detection method and electron beam irradiation apparatus

An electron beam irradiation apparatus in a partial vacuum method is structured with a static pressure floating pad connected to a vacuum chamber containing an electron beam column and in a condition that the static pressure floating pad is attached to a subject to be irradiated without contacting, and an electron beam irradiating the subject to be irradiated through an electron beam path of the static pressure floating pad , whereby the vacuum chamber and the electron beam column can be maintained in the required degree of vacuum even in a condition that the static pressure floating pad is separated from the subject to be irradiated. A vacuum seal valve including a piston to open and close the electron beam path is provided within the static pressure floating pad . When the static pressure floating pad is separated from the subject , the vacuum seal valve is structured to be activated to close the electron beam path so as to prevent the air from flowing into the vacuum chamber . In this structure, the vacuum seal valve is formed with a round shaped cross section and in a tapered shape with a narrow tip so as to accomplish high vacuum seal without a gap, so that the degree of vacuum in the vacuum chamber and the electron beam column can surely be maintained.

Electron beam irradiation apparatus and electron beam irradiating method

An electron beam irradiation system for shooting an electron beam at a master disk to make recordings. This system is capable of focusing the beam easily and accurately in a corresponding manner to the master disk, thus permitting accurate recordings. The system has a support mechanism portion holding the master disk on it. The support mechanism portion has a slide table on which a focusing stage is placed. The focusing stage has a knife edge and a Faraday cup. The knife edge is located immediately beside the master disk. When recordings are made, an electron beam is first shot at the focusing stage and brought to focus. Then, the beam is shot at the master disk, thus making recordings.

System and method for electron beam irradiation

An assembly of a one-way clutch and a bearing in which a thrust load due to a stator is absorbed and a dynamic pressure is generated is configured to prevent an abrupt temperature rise even when the pressure becomes high so that wear of sliding faces is prevented. The assembly of the one-way clutch and bearing is attached a stator of a torque converter. Dynamic pressure grooves and an escape groove serving as the bearings are formed in at least one of opposing faces of a flange portion formed on the stator and a pump member, or opposing faces of a bearing support which is placed on the side opposite to the flange portion of the stator, and a turbine member.

Assembly of a one-way clutch and a bearing

In a partial-vacuum-type, electron-beam irradiation system having a construction such that a static-pressure floating pad is connected to a vacuum chamber incorporating an electron-beam column, and an electron-beam passes through an electron-beam passage of the static-pressure floating pad to impinge on a body to be irradiated in the condition where the static-pressure floating pad is contactlessly attracted to the body to be irradiated, a vacuum-seal valve for opening and closing the electron-beam passage is provided inside the static-pressure floating pad, and when the static-pressure floating pad is separated away from the body to be irradiated, the vacuum-seal valve is actuated to close the electron-beam passage, whereby the atmospheric air is prevented from flowing into the vacuum chamber.

Electron beam irradiation system and electron beam irradiation method

A focusing stage is provided on a slide table of a support mechanism portion on which a master is supported, at a position adjacent to the master. At the time of recording, first, the focusing stage is irradiated with an electron beam to thereby focus the electron beam, and thereafter recording is conducted by irradiating the master with the electron beam.

Growing community of inventors

Kanagawa, Japan

Yoshihisa Miura