Sony Semiconductor Solutions Corporation

Yoshihisa Matoba

Kan Shimizu

Naohiko Kimizuka

Jun Ogi

Yuri Kato

To achieve decreased noise and improved sensitivity by reducing parasitic capacitance in a charge detection sensor. The charge detection sensor includes a detection element, a detection electrode, and a contact. The detection element is provided on one surface of a semiconductor substrate and detects a charge. The detection electrode is provided on another surface different from the one surface of the semiconductor substrate. The contact penetrates the semiconductor substrate and electrically connects the detection electrode and the detection element. Since no wiring layer is formed between the detection element and the detection electrode, the parasitic capacitance is reduced.

Growing community of inventors

Kanagawa, Japan

Yoshihisa Matoba