Hitachi-high-technologies Corporation

Yoshihiro Ohtsu

Isao Nagaoki

Toshiaki Tanigaki

A transmission electron microscope includes an electron gunthat irradiates a samplewith an electron beam; an electron detectorthat detects electrons that are passed through the sampleand scattered; a first detection-side annular aperturethat is located between the electron detectorand the sampleand has a ring-shaped slit that limits inner and outer diameters of a transmission region of electrons scattered from the sample; and a second detection-side annular aperturethat is located between the first detection-side annular apertureand the electron detectorand has a ring-shaped slit that limits inner and outer diameters of a transmission region of scattered electrons that have passed through the first detection-side annular aperture. It is, therefore, possible to detect electrons scattered at high scattering angles without a limitation caused by a spherical aberration of an electron lens and improve a depth resolution.

Growing community of inventors

Mito, Japan

Yoshihiro Ohtsu