Canon Kabushiki Kaisha

Eagle Industry Co., Ltd.

Kabushiki Kaisha Toshiba

Toshiba Memory Corporation

Kabushiki Kaisha Toyota Jidoshokki

Mitsubishi Electric Corporation

Stanley Electric Co., Ltd

Kioxia Corporation

Mitsubishi Denki Kabushiki Kaisha

Denso Corporation

Toyota Jidosha Kabushiki Kaisha

Mahle International Gmbh

Yokogawa Electric Works, Ltd.

Kelhin Corporation

Yoshihiro Ogawa

Kohei Fukudome

Satoshi Okada

Takashige Kasuya

Wataru Takahashi

Keigo Shirafuji

Masahiro Hayama

Yusuke Sato

Kazumi Nagano

Katsuro Takenaka

Toru Takahashi

Yusuke Hasegawa

Wakashi Iida

Hiroshi Tomita

Shinichi Takeda

Hisashi Okuchi

Masato Inoue

Keiichi Nomura

Motoaki Okuda

Hitoshi Yoshino

Masahiro Kiyotoshi

Yoshio Ozawa

Masayuki Tanaka

Hirohide Tanikawa

Katsuhisa Yamazaki

Shinichiro Abe

Hiroaki Yamada

Tomohisa Sano

Katsuyuki Sekine

Katsuaki Natori

Akihito Yamamoto

Hiroshi Kawamoto

Koji Nishikawa

Takayuki Kato

Hiroshi Tanabe

Yoshiaki Watanabe

Koji Sato

Yasuhito Yoshimizu

Katsuya Shirai

Hisaaki Kawade

Hideaki Hasegawa

Toshio Kimura

Masatoshi Itadani

Masami Fujimoto

Takayuki Kondo

Satoshi Umemura

Yoshihiro Suzuki

Daisuke Yoshiba

Toshiaki Iwa

Daichi Kurihara

Takahiro Ejima

Daisuke Tsujimoto

Hiroshi Yusa

Takayuki Hirose

Koichi Tomiyama

Mizuho Hiraoka

Satoru Sawada

Shunji Suzuki

Hiroyasu Nishihara

Tomoyuki Tamura

Atsushi Minagata

Hiroyuki Imataki

Soichi Nadahara

Katsuhiro Sato

Nobuyuki Okubo

Keita Nozawa

Shuhei Moribe

Ryota Fujitsuka

Yoshihiro Uozumi

Norio Uemura

Hideaki Hirabayashi

Tsutomu Onuma

Ryo Yamamoto

Kazuhiko Ueno

Nobuhide Yamada

Daisuke Nishida

Hirokazu Suzuki

Shuichi Nakagawa

Tadashi Fukuda

Yoshitaka Suzumura

Naoya Okada

Shuzo Isozumi

Norihito Naito

Satoshi Matsunaga

Masami Hano

Kyo Miura

Nobuo Oshima

Kazuto Hosoi

Akiya Nakayama

Takeshi Ohtsu

Takahiro Terada

Shoshiro Saruta

Takeo Fujita

Kazumi Yamauchi

Takashi Kase

Tadashi Doujo

Kuniaki Miyake

Ryuichiro Matsuo

Atsuko Kawasaki

There is provided a pressure applying device capable of applying pressure to a working object with a substantially constant force through a compact structure. The pressure applying device includes a pressure accumulating portion; a piston including a small-diameter portion inserted into a cylinder portion on a pressure accumulating portion side, and a large-diameter portion disposed close to a working object W; and a tubular body extending from the large-diameter portion to the cylinder portion. A lubricating fluid is held inside the tubular body.

Pressure applying device

A capacity control valve includes a valve housing provided with a discharge port, suction ports, a control port allowing a control fluid of a control pressure Pc to pass therethrough and a primary valve including a primary valve seat and a primary valve body driven by a solenoid and opening and closing a communication between the discharge port and the control port by the movement of the primary valve body. The capacity control valve further includes a CS valve which includes a CS valve body, a first spring urging the CS valve body in a closing direction, and a second spring urging the CS valve body in an opening direction, the control port and the suction port being opened at a valve closed position of the primary valve body, the control port and the suction port being closed at a valve opened position of the primary valve body.

Capacity control valve

According to one embodiment, a substrate processing method is disclosed. The method can include treating a substrate with a first liquid. The substrate has a structural body formed on a major surface of the substrate. The method can include forming a support member supporting the structural body by bringing a second liquid into contact with the substrate wetted by the first liquid, and changing at least a portion of the second liquid into a solid by carrying out at least one of causing the second liquid to react, reducing a quantity of a solvent included in the second liquid, and causing at least a portion of a substance dissolved in the second liquid to be separated. The method can include removing the support member by changing at least a part of the support member from a solid phase to a gaseous phase, without passing through a liquid phase.

Substrate processing method and substrate processing apparatus

A capacity control valve for controlling a capacity of a fluid includes: a valve housing; a main valve closing and opening a communication between a Pc port and a Pd port when a main valve portion of a main valve element driven by a drive force of a solenoid comes into contact with and separates from a main valve seat; a pressure-sensitive valve which is opened by an ambient pressure; a hollow tube member which forms a part of the pressure-sensitive valve and allows the Pc port to communicate with a Ps port through a hollow communication path formed therein when the pressure-sensitive valve is opened; and an auxiliary communication path allows the Pc port to communicate with the Ps port independently of the pressure-sensitive valve, and the auxiliary communication path is configured to be able to increase a flow path cross-sectional area after the main valve is closed.

A semiconductor manufacturing apparatus according to the present embodiment comprises a chamber. A chemical-agent supply part is configured to supply a water-repellent agent or an organic solvent to a surface of a semiconductor substrate having been cleaned with a cleaning liquid in the chamber. A spray part is configured to spray a water-capture agent capturing water into an atmosphere in the chamber.

Semiconductor manufacturing apparatus and manufacturing method of semiconductor device

A software studying unit () calculates software processing time of each of a plurality of functions in a target source program. A data-flow graph generation unit () generates an inter-function data-flow graph of the plurality of functions based on the target source program. A hardware studying unit () calculates hardware processing time of each function and a circuit scale of each function by a high-level synthesis for the target source program. An implementation combination selection unit () selects, based on the software processing time of each function, the hardware processing time of each function, the circuit scale of each function, and the inter-function data-flow graph, an implementation combination of one or more functions to be implemented by software and one or more functions to be implemented by hardware.

Support system and computer readable medium

A capacity control valve includes a valve housing provided with a discharge port, suction ports, and a control port and a primary valve including a primary valve seat and a primary valve body driven by a solenoid, the primary valve being configured to open and close a communication between the discharge port and the control port in accordance with a movement of the primary valve body. The capacity control valve further includes a differential CS valve which is openable and closable by a pressure difference between the control pressure Pc and the suction pressure Ps and an electromagnetic CS valve that is openable and closable so as to close the control port and the suction port in a non-energized state of the solenoidin accordance with the movement of the primary valve body.

A capacity control valve includes: a valve body () including first communication passages (), second communication passages (), third communication passages (), and a main valve seat (); a valve element () including an intermediate communication passage (), a main valve portion (), and an auxiliary valve portion; a solenoid () that drives a rod () provided with an auxiliary valve seat (); a first biasing member () that biases in a valve closing direction of the main valve portion (); and a second biasing member () that biases in a valve closing direction of the auxiliary valve portion (), wherein the rod () moves relative to the valve element () to open and close the auxiliary valve portion (). The capacity control valve allows a liquid refrigerant to be efficiently discharged and allows a driving force of a compressor to be decreased.

Capacity control valve and method for controlling capacity control valve

A capacity control valve includes a CS valve which opens and closes a communication between the control fluid and the suction fluid by the movement of rods and an urging member configured to urge the primary valve body and the rods in opposite directions and the primary valve body and the rods are disposed so as to be relatively movable in an axial direction.

A capacity control valve, which can efficiently discharge a liquid refrigerant and reduce the driving force of a compressor, includes: a valve main body () including a first communication passage (), a second communication passage (), a third communication passage () and a main valve seat (); a valve body () including an intermediate communication passage (), a main valve part () and an auxiliary valve part (); a solenoid () which drives a rod () having an auxiliary valve seat (); a first biasing member () which biases the main valve part () in the valve closing direction thereof; and a second biasing member () which biases the main valve part () in the valve opening direction thereof, and the rod () relatively moves to the valve body (), and opens and closes the auxiliary valve part ().

Capacity control valve and control method for capacity control valve

A capacity control valve () includes a valve main body () having a first communication passage (), a second communication passage (), a third communication passage (), and a main valve seat (), a valve element () having an intermediate communication passage (), a main valve portion (), and an auxiliary valve portion (), a solenoid () that drives a rod () having an auxiliary valve seat (), and a first biasing member () that biases in the valve closing direction of the main valve portion (). The rod () is relatively moved with respect to the valve element () so as to open and close the auxiliary valve portion. The capacity control valve can efficiently discharge a liquid coolant irrespective of pressure of a suction chamber and lower drive force of a compressor at a liquid coolant discharging operation.

Capacity control valve and method for controlling same

A capacity control valve includes a valve housing provided with a discharge port, suction ports, a control port and a primary valve driven by a solenoid. The capacity control valve further includes a differential CS valve which includes a differential CS valve body disposed so as to be relatively movable in an axial direction with respect to the primary valve bodies. The differential CS valve body divides a control pressure chamber into a discharge side control chamber communicating with the first control port and a suction side control chamber communicating with the second control port in the axial direction and operates the differential CS valve body by a differential pressure between the discharge side control chamber and the suction side control chamber so as to open the second control port and the suction port.

A capacity control valve () includes a valve main body () having a first communication passage (), a second communication passage (), a third communication passage (), and a main valve seat (), a pressure-sensitive body (), a valve element () having an intermediate communication passage (), a main valve portion (), and a restrictor portion (), and a solenoid () that drives a rod (). The rod () is relatively moved with respect to the valve element () so as to control an opening degree of the restrictor portion (). The capacity control valve is capable of efficiently discharging a liquid coolant irrespective of pressure of a suction chamber and improving control stability.

A capacity control valve () includes a valve main body () having a first communication passage (), a second communication passage (), a third communication passage (), and a main valve seat (), a valve element () having an intermediate communication passage (), a main valve portion (), and an auxiliary valve portion (), a solenoid () that drives a rod () having an auxiliary valve seat (), and a first biasing member () that biases in the valve closing direction of the main valve portion (). A spring constant of the first biasing member () has a characteristic that the spring constant is increased in an opened state of the main valve portion () and decreased in a closed state. The capacity control valve can efficiently discharge a liquid coolant and lower drive force of a compressor at a liquid coolant discharging operation.

A capacity control valve includes: a valve housing having a Pc port, a Ps port and a Pd port; a main valve element which includes a main valve portion coming contacting and separating from a main valve seat opening and closing communication between the Pd port and the Pc port by a drive force of a solenoid; an intermediate communication path communicating the Pc port with the Ps port; and a pressure-sensitive valve opening and closing the intermediate communication path by an ambient pressure, in which the valve housing have a differential pressure valve housed therein, the differential pressure valve including a differential pressure valve element and opening and closing a communication between the Pc port and the Ps port by the differential pressure valve element moved by an operation force of an operation member operated by a discharge pressure Pd from the Pd port.

Growing community of inventors

Tokyo, Japan

Yoshihiro Ogawa