Kabushiki Kaisha Yaskawa Denki

Yoshihiro Kusama

Katsuya Okumura

Yoshiki Kimura

Tomohiro Matsuo

Masatoshi Furuichi

Takayuki Nakamura

Toshiyuki Harada

Keisuke Yoshino

Tadataka Noguchi

Hideo Yamamoto

Yoshitaka Ohfuchi

Hideharu Zenpo

Mitsuaki Hagio

Shin Osaki

Toshitaka Miyazato

A conveying system according to an embodiment includes a robot and a controller. The controller includes a switching unit. The robot includes an arm unit formed of a hand and a plurality of arms connected rotatably with respect to one another, and a base unit. An arm on a rear end side is connected to the base unit rotatably about a rotation axis, and the hand is rotatably connected to an arm on a front end side. The switching unit switches cylindrical coordinate control for controlling the arm unit such that a trajectory of the hand overlaps with any one of lines radiating from the rotation axis and rectangular coordinate control for controlling the arm unit such that the trajectory of the hand overlaps with none of the lines at a predetermined timing.

Conveying system

A robot controlling apparatus ensures that the maintenance work can be property and safety practiced and efficiently uses the space of the housing of the robot controlling apparatus. A robot controlling apparatus is provided with a first housing () for accommodating first internal devices (), a second housing () for accommodating second internal devices (), and a front door () supported by a first hinge (), which is provided on a side of the first housing, being capable of freely opening and closing, wherein a second hinge () is provided on the sides of the first and the second housing and the entire first housing is supported by the second hinge being capable of freely opening and closing with respect to the second housing and the accommodating portion () extending from a front portion of the second housing under the second front opening.

Robot controlling apparatus and robot system

A substrate holding apparatus includes a base plate with a two-pronged portion, a holding plate arranged above the base plate, a driving portion provided therebetween, a holding portion formed by a tip end of the two-pronged portion and a tip end of the holding plate, and a guide portion provided at the tip end of the two-pronged portion for guiding a part of the substrate. The driving portion includes an urging means for always urging a basal end side of the holding plate upward, an electric magnetic portion for drawing the holding plate toward the base plate, and a bearing portion arranged at on the tip end side of the base plate. The guide portion has a guide groove which comes into contact with a part of a periphery of the substrate.

Substrate holding apparatus, substrate transferring robot equipped with the same, and semiconductor production apparatus

A vacuum robot includes an arm portion on which a work is to be disposed under a reduced pressure environment and a motor portion for rotatably driving the arm portion, the vacuum robot being configured to transfer the work by causing a rotational movement of the arm portion by the motor portion. The motor portion comprises a rotor portion connected to the arm portion, a stator portion disposed at an external periphery of the rotor portion, a housing disposed under an atmospheric pressure environment, and a thin cylindrical can disposed in an electromagnetic gap formed between the rotor portion and the stator portion and secured to the housing so that the stator portion is air-tightly encapsulated in a space formed by the housing and the can. The space is maintained in a depressurized state by a seal.

Vacuum robot, vacuum motor for vacuum robot, and production method of said vacuum motor

It is an object to provide an aligner for centering a wafer and adjusting an angle of a notch or the like of the wafer while gripping edges of the wafer capable of attaining a shortened takt time and miniaturization of the apparatus by employing a mechanism capable of infinite rotation without being restricted by a rotational range, by eliminating cables and/or tubes at the rotating portion. The link mechanism for causing opening and closing movements of the gripping mechanism for gripping a waferis supported via a bearingwith respect to the link mechanism driving portion for driving the link mechanism so that only the gripping portion and the link mechanism can be rotated.

Aligner

Growing community of inventors

Kitakyushu, Japan

Yoshihiro Kusama