Canon Kabushiki Kaisha

Yoshihiro Koura

Kunihiko Asada

A method of controlling an imprint process to form a pattern by using a mold on a substrate is provided. The method includes inspecting to determine whether to continue or stop a series of imprint processes during the series of imprint processes of a lot, wherein the inspecting includes capturing an image of the pattern formed on a shot region by the imprint process, obtaining, by comparing a position of a peripheral portion of the pattern in the image and a design value of the position of the peripheral portion, an extrusion amount of an imprint material from the shot region due to the imprint process, and determining, based on a change in the extrusion amount over a plurality of imprint processes, a next process to transition from a current process upon stopping the series of imprint processes.

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Utsunomiya, Japan

Yoshihiro Koura