Hitachi-high-technologies Corporation

Thk Co., Ltd.

Other

Mitsumi Electric Company Ltd.

Acteiive Corporation

Yoshihiro Kimura

Fumihiro Sasajima

Toshiyuki Aso

Osamu Komuro

Hidetoshi Morokuma

Takashi Doi

Hidekazu Michioka

Satoru Yamaguchi

Yoshinobu Tanaka

Noriaki Arai

Kei Sakai

Yoshinori Momonoi

Ichiro Hayashi

Masashi Ishii

Hiroshi Kaneshige

Atsushi Kikuchi

Yasunori Takasugi

Yukihiro Takimoto

Akihiro Miura

Makoto Iizumi

Hideki Itai

Toshimasa Kameda

Yoshihiro Kanai

Yasutaka Seki

Misato Imai

Hisayuki Kojima

Kenichi Aburai

Yukiko Kikuchi

An optical actuator is an optical actuator configured to move an optical element by a driving part, and includes a movable-side member configured to hold the optical element, a fixed-side member configured to support the movable-side member such that the movable-side member is movable, and a cushioning member disposed on the movable-side member, in which the cushioning member includes a first cushioning surface and a second cushioning surface that face the fixed-side member at respective different distances.

Optical actuator, camera module, and camera-mounted device

Provided is a charged particle beam apparatus, aiming at obtaining an image and the like focused on the sample surface and the bottom while preventing the visual field deviation occurred when focusing on the sample surface and the bottom respectively. The charged particle beam apparatus forms a first image (), which is based on detection of the first energy charged particles, based on an irradiation with a beam whose focus is adjusted on a sample surface side, forms a second image () which is based on detection of second energy charged particles having a relatively higher energy than the first energy and a third image () which is based on the detection of the first energy charged particles, based on the irradiation with a beam whose focus is adjusted on a bottom side of a pattern included in the sample, acquires a deviation between the first image and the third image, and composes the first image and the second image so as to correct the deviation.

Charged particle beam apparatus

A glucose production method is characterized in that a cellulose raw material is decomposed using a mixture of a cellulolytic enzyme, and saliva or an activating auxiliary agent derived from biological saliva. The method achieves excellent glucose yield.

Glucose production method and glucose produced by said method

A charged particle radiation apparatus includes a control device that switches between a first charged particle beam and a second charged particle beam, the first charged particle beam being scanned to acquire an image and a waveform signal, the second charged particle beam being scanned over a sample before the scan of the first charged particle beam and used to charge the sample more than the first charged particle beam; wherein the control device is configured to acquire at least one of signal waveform data and image data about a pattern formed on the sample in accordance with a scan performed on the sample by the second charged particle beam, and to stop, when the acquired data has proved to be indicative of a predetermined state, the scan of the second charged particle beam.

Charged particle radiation apparatus

In measuring pattern with large process fluctuation, correct measurement cannot be carried out if noises, such as pattern that is not the subject to be measured, and dirt, are present in periphery of pattern to be measured in previously registered measurement region. Among the image data of sample, predetermined region aligned by pattern matching is set as region not to be measured that is excluded from subjects of pattern measurement. For example, in measuring pattern with large process fluctuation, only region including pattern with small process fluctuation is used in pattern matching, while in measuring the pattern, predetermined region, which was used in pattern matching and aligned, is set as region not to be measured. Stable pattern measurement can be easily carried out with respect to pattern with large process fluctuation, without being affected by region where measurement region and region not to be measured overlap with each other.

Pattern measuring method, pattern measuring apparatus, and program using same

Disclosed is a micro actuator capable of being formed in compact as a whole, such as 10 mm in diameter by diminishing a difference between a stroke distance of a moving member and an overall length, and by reducing a sectional area taken in a direction orthogonal to a stroke direction. The micro actuator includes: a spline shaft formed as a cylinder with a hollow part and having an axially extending slit opening; a spline nut fit-engaged with the spline shaft and axially guiding the spline shaft; a pair of end caps fixed to openings at both ends of the spline shaft; a magnet rod supported at both ends within the hollow part of the spline shaft by the end caps; and a forcer loosely fit-engaged with a periphery of the magnet rod within the hollow part of the spline shaft to constitute a linear motor together with the magnet rod and connected with the spline nut through the slit opening.

Micro actuator

Provided is a linear motor actuator which generates a sufficient thrust force and a retaining force and is remarkably smaller than conventional linear motor actuators. The linear motor actuator includes a base member () provided with a bottom plate () and a pair of side walls () and formed in a channel shape; a track rail () laid on the bottom plate along a longitudinal direction of the base member; a slide table () moving along the track rail; stator magnets () arranged on an inner side surface of each of side walls of the base member; and a pair of coil members () mounted to the slide table and opposed to the stator magnets provided to each of the side walls of the base member, thereby constituting a linear motor ().

Linear motor actuator

Provided is an XY table actuator that, while building-in a drive means for freely moving an object placed on a table within an XY-plane and positioning the object, can be significantly reduced in size and that helps to suppress an increase in table height. The actuator has: a stationary plate () having a receiving groove extending in an X-direction; a moving plate () having a receiving groove extending in a Y-direction; an intermediate plate () whose lower body is assembled to the receiving groove () of the stationary plate () through intermediation of rolling bodies (), whose upper body is assembled to the receiving groove of the moving plate () through intermediation of rolling bodies (), and which is movable in the X-direction with respect to the stationary plate, with the moving plate being movable in the Y-direction with respect to the intermediate plate; an X-drive means () for propelling the intermediate plate in the X-direction with respect to the stationary plate; and a Y-drive means () for propelling the moving plate in the Y-direction with respect to the intermediate plate, in which the intermediate plate is provided with receiving chambers () for the X-drive means and the Y-drive means, respectively.

XY table actuator

An X-Y table actuator is constituted by stacking a stationary plate, an intermediate plate, and a movable plate. Between the stationary plate and the intermediate plate, arranged is an X-direction drive means for driving the intermediate plate in an X-direction with respect to the stationary plate. Between the intermediate plate and the movable plate, on the other hand, there is provided a Y-direction drive means for moving the movable plate forward and backward in a Y-direction with respect to the intermediate plate. By stacking the stationary plate and the movable plate, which are formed into a substantially channel-shape, and the intermediate plate, which is formed into a substantially flat-shape on each other, a housing chamber for the X-direction drive means is formed between the stationary plate and the intermediate plate, and a housing chamber for the Y-direction drive means is formed between the intermediate plate and the movable plate.

X-Y table actuator

In an apparatus for obtaining an image by irradiating a charged particle beam on a specimen, a condition of the beam conditioned differently from vertical incidence as in the case of the beam being tilted is required to be adjusted. To this end, the apparatus has a controller for automatically controlling a stigmator, an objective lens and a deflector such that astigmatism is corrected, focus is adjusted and view filed shift is corrected. The controller has a selector for inhibiting at least one of the astigmatism correction, focus adjustment and FOV shift correction from being executed.

Charged particle beam adjusting method and charged particle beam apparatus

A pattern measuring method calculates an average pattern shape from a plurality of the same patterns appearing within an image captured using an electron microscope, and compares pattern information at each measuring position with average pattern information to determine roughness.

Pattern measuring method

Growing community of inventors

Tokyo, Japan

Yoshihiro Kimura