Canon Kabushiki Kaisha

Yoshihiro Kawauchi

Kunitaka Ozawa

Daisuke Itai

Mitsuhiro Masuda

Hisao Nakagawa

Hiroaki Fujiwara

Hajime Nakamura

An information processing apparatus includes an acquisition unit configured to acquire information including first processing data indicating a result of substrate processing performed by a first substrate processing apparatus, and second processing data indicating a result of substrate processing performed by a second substrate processing apparatus different from the first substrate processing apparatus, and a display control unit configured to control display on a display device based on the information acquired by the acquisition unit. The display control unit displays the first processing data and the second processing data in different regions.

Information processing apparatus, information processing method, article manufacturing system, and article manufacturing method

An information processing apparatus for processing information generated by an exposure apparatus which exposes a substrate to radiant energy, comprises an information collecting unit configured to collect first apparatus information obtained by the exposure apparatus via an operation thereof with respect to each of a plurality of first regions which form a first array defined on the substrate, a converting unit configured to convert at least a part of the first apparatus information collected with respect to each of the plurality of first regions by the information collecting unit into second apparatus information with respect to each of a plurality of second regions which form a second array, a statistical processing unit configured to statistically process the second apparatus information, and an analyzing unit configured to analyze the statistical processing result obtained by the statistical processing unit.

Information processing apparatus, information processing method, and memory medium

An information processing system using apparatus data recorded in a database in accordance with a data definition updated as needed, comprises a storage unit configured to store a data definition history that makes a data definition version and a period during which a data definition for the data definition version was used to correspond to each other, a data definition library in which the data definition version and the data definition for the data definition version are registered in correspondence with each other, and a detection unit configured to detect, from the data definition history, a data definition version of a data definition used in a period designated via a user interface, to detect a data definition for the detected data definition version from the data definition library, and to provide the detected data definition version and data definition to the user interface.

Information processing system, information processing method, and memory medium

An information processing system which utilizes apparatus data recorded in a database in conformity with a data definition which can be updated as needed, comprises a storage unit configured to store a data definition history in which a data definition version is associated with a period for which a data definition in the data definition version is used, a data definition library configured to register a data definition version and a data definition in the data definition version in association with each other, an extractor configured to extract, from the database, apparatus data which meets an extraction condition including an extraction period designated via a user interface, and a converter configured to convert an expression of the apparatus data extracted by the extractor into an expression conforming to a data definition designated via the user interface.

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Utsunomiya, Japan

Yoshihiro Kawauchi