Other

Yoshihiko Watanabe

Yasuhiko Hashimoto

Yasuo Kawamatsu

To provide a substrate transport device and a transport teaching system which can automatically perform a teaching processing in order to reduce the burden of an operator and to eliminate a positional shift accurately and efficiently in a short time. Optical connectors and of a jig and optical connectors and fixedly provided on a substrate transport device are opposed to each other and optical axes are coincident with each other. A lens having a high condensation ratio is provided in each optical connector. A light signal is output from optical sensor heads and through an optical fiber F , each optical connector and an optical fiber F , and a light signal input to optical sensor heads and is guided into the substrate transport device. Then, an arm is automatically moved in a three-axis direction. Thus, an edge position of a detected portion is detected to acquire positional information so that teaching information is obtained.

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Kyoto, Japan

Yoshihiko Watanabe