Other

Hitachi, Ltd.

Renesas Technology Corp.

Yoshiharu Shigyo

Minori Noguchi

Hidetoshi Nishiyama

Yoshimasa Ohshima

Yukio Kembo

Hiroshi Morioka

Kazuhiko Matsuoka

Kenji Watanabe

Masataka Shiba

Mari Nozoe

Yasuhiro Yoshitake

Seiji Ishikawa

Fumio Mizuno

Toshimitsu Hamada

Seiji Isogai

Ikuo Suzuki

Isao Miyazaki

Jun Nakazato

Yuichi Ohyama

Masami Ikota

Makoto Ariga

Tetsuji Yokouchi

Terushige Asakawa

Hidekuni Sugimoto

Hideaki Doi

Yuzo Taniguchi

Fumiaki Endo

An apparatus and method for detecting defects on a specimen includes an illumination optical unit which obliquely projects a laser onto a region which is longer in one direction on a surface of a specimen than in a transverse direction, a table unit which mounts the specimen and which is movable, a detection optical unit which detects light from the specimen illuminated by the laser with an image sensor while the table is moving, and a signal processor. The signal processor processes a signal outputted from the image sensor of the detection optical unit and converted to a digital signal and extracts defects of the specimen by comparing the converted digital signal with a reference digital signal. A display unit displays information of defects extracted by the signal processor.

Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process

A processing method for semiconductor devices in a semiconductor fabrication line includes processing a substrate in a first processing apparatus, transferring the substrate processed in the first processing apparatus to a detecting apparatus without removal of the substrate from the semiconductor fabrication line while continuing fabrication of the semiconductor devices, detecting foreign particle defects on the substrate transferred to the detecting apparatus, and determining a foreign particle generation condition of the processing apparatus based on a data from the detecting.

A process management system in accordance with the present invention includes inspection apparatuses for inspecting defects on a wafer, the inspection apparatuses being connected through a communication network, inspection information and image information obtained from these inspection apparatuses being collected to construct a data base and an image file, therein definition of defects is given by combinations of elements which characterize the defect based on the inspection information and the image information obtained from the inspection apparatuses. By giving definition of the defect, characteristics of the defect can be subdivided and known. Therefore, the cause of a defect can be studied.

Process management system

A semiconductor device producing method and a semiconductor device producing system employs a processing apparatus provided with a dust particle detecting apparatus. The dust particle detecting apparatus measures the condition of adhesion of dust particles adhering to a work at least before or after processing the work, manages the condition of incremental adhesion of dust particles to the work resulting from processing for each lot of works or for each work on the basis of the measured condition of adhesion of dust particles measured before or after processing the work, and determines the time when the processing apparatus is to be cleaned or the cycle of cleaning the processing apparatus on the basis of the managed condition of adhesion of dust particles.

Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system

Process control system

A defect detecting apparatus including an illumination system for radiating a light of a plane wave linearly to a substrate having repetitive patterns of different pitches; a focusing optical system for focusing a light image reflected from the substrate thus illuminated by the illumination system; a spatial filter disposed intermediate the focusing optical system so as to shield a diffraction light from repetitive patterns of a small pitch on the substrate; a detector for detecting the light image formed by the focusing optical system; an erasing means for comparing and erasing signals which are generated on the basis of repetitive patterns of a large pitch and obtained through the spatial filter, out of signals detected by the detector; and a defect detecting means for detecting defects on the substrate in accordance with a signal detected by the detector, as well as a method applied to the said apparatus.

Method and apparatus for analyzing the state of generation of foreign

Growing community of inventors

Takasaki, Japan

Yoshiharu Shigyo