Mitsubishi Denki Kabushiki Kaisha

Yoshiharu Komine

Takao Sawada

Masatoshi Kobayashi

Katsutoshi Muto

Masatosi Kobayashi

An apparatus for liquid phase epitaxial film growth includes a mother boat for supporting a substrate, a melt boat slidable on the mother boat for containing a melt and selectively bringing the substrate and the melt into contact, and a lid for opening and closing the melt boat. The mother boat is disposed in a quartz tube and push rods extend into the tube for sliding the lid to open and close the melt boat.

Liquid phase epitaxial film growth apparatus

A hetero-epitaxial liquid phase growth method for growing a compound semiconductor by liquid phase epitaxy includes placing a melt in a closed melt boat on a substrate and epitaxially growing a first thin film, opening the melt boat while the melt remains in a melted state for a predetermined time to evaporate a component of the melt, and epitaxially growing a second thin film on the first thin film from the melt from which the component has been evaporated.

Hetero-epitaxial liquid phase growth method

A gas sensing element made of a gas sensing material composed of a composite oxide of titanium and niobium as the principal constituent, which is capable of measuring with high sensitivity and selectivity those gases such as hydrogen sulfide, methyl mercaptan, etc. issuing offensive odor, and alcohol, due to variations in electrical resistance of the material.

Gas sensing element

A gas and humidity sensing element in a single integral structure made of a base plate of apatite ceramics, on which a particular metal oxide such as tin oxide, zinc oxide, or composite oxide of titanium and niobium is provided. The sensing element has a function of sensing gas and humidity with outstanding sensitivity to bad smell gas and alcoholic gas, in which the humidity is sensed and measured by variations in electrical resistance of the apatite ceramic base plate and the bad smell gas such as hydrogen sulfide, methyl mercaptan, etc. is sensed and measured by variations in electrical resistance of the metal oxide.

Gas and humidity sensing element

A moisture sensitive device is disclosed which comprises a moisture sensitive element including a material comprising a hydroxyapatite, i.e. M.sub.10 (PO.sub.4).sub.6 (OH).sub.2, wherein M is at least one member selected from the group consisting of Sr, Ca and Ba, at least two electrodes formed on the moisture sensitive element, with the electrodes being separated by the element, and electrical leads connected to each of the electrodes.

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Itami, Japan

Yoshiharu Komine