Sony Corporation

Yoshiharu Honjo

Yoshihiro Oshima

Hiroichi Ishikawa

Tomio Kobayashi

Shinobu Mitsuhashi

Barret Lippey

Masataka Yamashita

Koichi Kaneko

Disclosed is an antireflection film used to be stuck on the surface of a glass panel of a CRT, which can be inexpensively manufactured at a high productivity while satisfying all of requirements regarding its adhesive strength, reflectance characteristic, electric resistance and total light transmittance. The antireflection film is formed by stacking silicon oxide films and indium tin oxide films on a base film in multilevels, wherein the thickness of the uppermost silicon oxide film of the antireflection film is thicker than the indium tin oxide film directly under the uppermost silicon oxide film, and the lowermost silicon oxide film, positioned at the interface with the base film, of the antireflection film is a SiO,film where the value x is in a range of 0.5 to 1.9.

Antireflection film and manufacturing method thereof

Disclosed is a black roll for optical measurement, which is used for a process of moving a film substrate around the black roll, and measuring optical characteristics of a thin film formed on the film substrate by using an optical monitor disposed in proximity to the film substrate. The black roll includes: a rotating cylinder colored in black, with the circumferential surface of which the film substrate is in close-contact; wherein the rotating cylinder has at least one groove formed in the circumferential surface of the rotating cylinder in such a manner as to extend in the circumferential direction, the groove being adapted to absorb light which is emitted from the optical monitor, passing through the film substrate, and is made incident on the black roll. The black roll is effective to eliminate almost all reflectance of light from the black roll in the case of measuring the reflectance of an optical thin film formed on a film substrate moved in such a manner as to be in close-contact with the black roll.

Black roll for optical measurement, thin film forming apparatus

Growing community of inventors

Kanagawa, Japan

Yoshiharu Honjo