Mitsubishi Denki Kabushiki Kaisha

Yoshie Noguchi

Kazuya Kamon

Masaaki Tanaka

Teruo Miyamoto

Yasuhito Myoi

A semiconductor device is mounted on a heating stage, and the temperature of the semiconductor device is set to be at least 60&deg; C. and lower than the melting point of a solder. With the use of an ejecting head, molten solder is ejected from a nozzle towards an electrode part. The molten solder ejected from the ejecting head impinges upon the surface of the electrode part. Upon impingement, the molten solder spreads over the surface of the electrode part by wetting, thereby to form a bump electrode on the electrod part. Sufficient joining strength between the bump electrode and the underlying conductive region is ensured.

Electrode forming method and bump electrode formable base used therefor

A projection aligner includes a light source, a condenser lens system for directing light from the light source onto a mask on which a circuit pattern is formed, a projecting lens system for collecting on the surface of a wafer the light transmitted through the mask, and an aperture member disposed between the light source and the condenser lens system. The aperture member includes a transmitting zone for transmitting light from the light source and a phase shift member for producing a predetermined phase difference between light transmitted through the transmitting zone and light transmitted through a region surrounding the transmitting zone.

Projection aligner

A projection aligner includes a light source, a condenser lens system for directing light from the light source onto a mask on which a circuit pattern is formed, a projecting lens system for collecting on the surface of a wafer the light transmitted through the mask, and a pupillary member disposed on a pupillary surface of the projecting lens system. The pupillary member includes at least one transmitting zone for transmitting the light transmitted through the mask including a phase shift member for producing a predetermined phase shift in light transmitted through part of the transmitting zone.

Growing community of inventors

Amagasaki, Japan

Yoshie Noguchi