Mitsubishi Electric Corporation

Yoshichika Miwa

Toshiyuki Ando

Jiro Suzuki

Takao Endo

Hitomi Ono

Akihiro Fujie

A light source system () illuminating an optical system to be inspected () and making light fluxes of a plurality of wavefront measurement visual fields be emitted from the optical system to be inspected; a single wavefront sensor () calculating wavefront aberration on a basis of measurement of the light fluxes of the plurality of wavefront measurement visual fields emitted from the optical system to be inspected (); and an optical path optical system () are included. The optical path optical system selectively makes the light fluxes of the plurality of wavefront measurement visual fields emitted from the optical system to be inspected () be incident on the wavefront sensor ().

Growing community of inventors

Tokyo, Japan

Yoshichika Miwa