Japan Aviation Electronics Industry, Limited

Hosiden Corporation

Yoshichika Kato

Keiichi Mori

Osamu Imaki

Kenji Kondou

Yoshihiko Hamada

Satoshi Yoshida

Ryoji Kaku

Mitsuo Ukechi

Takao Mase

Ayumi Takahashi

A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single-crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.

Method of making microminiature moving device

A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single -crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.

Microminiature moving device

The present invention seeks to realize an optical device that is capable of preventing stray light from entering light input and output means such as optical fibers and that excels in return loss characteristics. The optical device has a free space at least having a wall surface at part thereof, one or more light output means that outputs a light beam toward the free space and one or more light input means that inputs the light beam arriving through the free space. The optical device further includes an antireflective means such as a terminal waveguide provided at either part of the wall surface to prevent unwanted light irradiated to that part of the wall surface from being reflected to the free space.

Optical device

There is provided an electrostatic actuator with the interdigitated electrode structure comprising a movable roddisposed in parallel with an alignment axis line Ox predetermined on a substrate; a movable interdigitated electrodefixed on the both sides of a coupling pointC on the movable rodand having a plurality of movable electrode fingers; fixed interdigitated electrodesfixed to the substrate and having a plurality of fixed electrode fingers; and four hingeswhose one ends are anchored respectively to the movable rod and the other ends are anchored to anchoring pointsA-D of the substrate. Lengths of those hinges are longer than distances from anchoring points to the alignment axis line and a displacement Lc of a coupling pointC in a direction orthogonal to the alignment axis line is reduced to be smaller than a distance between the respective movable electrode fingers and the closest fixed electrode finger.

Electrostatic actuator with interdigitated electrode structure

Marker grooves of an optical fiber are formed by a marker groove forming device including at least, on a substrate, a fiber guide and optical fiber pressing springs formed on a side wall surface in the fiber guide. The optical fiber pressing springs include edges contacted and pressed to the side of an optical fiber stored in the fiber guide, and plate springs for pressing the edges to the side of the optical fiber with fulcra on the side wall surface in the fiber guide. The optical fiber is pressed to a side wall surface in the fiber guide, and the edges are formed at a predetermined distance from each other.

Marker groove forming device

A micro-optic device including a complicate structure and a movable mirror is made to be manufactured in a reduced length of time. A silicon substrate and a single crystal silicon device layer with an intermediate layer of silicon dioxide interposed therebetween defines a substrate on which a layer of mask material is formed and is patterned to form a mask having the same pattern as the configuration of the intended optical device as viewed in plan view. A surface which is to be constricted as a mirror surface is chosen to be in a plane of the silicon crystal. Using the mask, the device layer is vertically etched by a reactive ion dry etching until the intermediate layer is exposed. Subsequently, using KOH solution, a wet etching which is anisotropic to the crystallographic orientation is performed with an etching rate which is on the order of 0.1 &#x3bc;m/min for a time interval on the order of ten minutes is performed to convert the sidewall surface of the mirror into a smooth crystallographic surface. Subsequently, the intermediate layer is selectively subject to a wet etching to remove the intermediate layer only in an area located below the movable part of the optical device.

Method of manufacturing micro-optic device

Method of forming an optical fiber

A micro-optic device including a complicate structure and a movable mirror is made to be manufactured in a reduced length of time. A silicon substrate and a single crystal silicon device layer with an intermediate layer of silicon dioxide interposed therebetween defines a substrate on which a layer of mask material is formed and is patterned to form a mask having the same pattern as the configuration of the intended optical device as viewed in plan view. A surface which is to be constructed as a mirror surface is chosen to be in a plane of the silicon crystal. Using the mask, the device layer is vertically etched by a reactive ion dry etching until the intermediate layer is exposed. Subsequently, using KOH solution, a wet etching which is anisotropic to the crystallographic orientation is performed with an etching rate which is on the order of 0.1 &#x3bc;m/min for a time interval on the order of ten minutes is performed to convert the sidewall surface of the mirror into a smooth crystallographic surface. Subsequently, the intermediate layer is selectively subject to a wet etching to remove the intermediate layer only in an area located below the movable part of the optical device.

Micro-optic device and method of manufacturing same

An optical fiber device comprising a positioning/fixing substrate has a fiber guide and an optical fiber pressing spring formed in the fiber guide, and an optical fiber stored in the fiber guide. The optical fiber includes an end part having at least one marker groove. The fiber guide is a groove having two side wall surfaces. The optical fiber pressing spring includes a plate spring formed on one of the side wall surfaces in the fiber guide and an edge formed on the plate spring. The plate spring presses the edge to the side of the optical fiber with a fulcrum on one of the side wall surfaces, and the end part of the optical fiber is positioned by aligning the marker groove of the optical fiber with the edge of the optical fiber pressing spring.

Optical fiber device

A blocking portion is provided at an end of the mirror to prevent a light beam emitted from an input port from being transmitted to or reflected by first and second output ports. The mirror is inserted to a position where the end of the blocking portion of the mirror reaches a boundary P' on the insertion side of an area to be blocked to obtain a permissible crosstalk value of the light beam. The mirror is removed to a position where the rear end of the blocking portion of the mirror reaches a boundary Pon the removal side of the area to be blocked. The mirror is movably driven between the removal position and the insertion position in the optical path of a first light beam by a drive. Thus it is possible to reduce the length of the driving stroke of the mirror.

Optical Switch

In a microminiature moving device that has disposed, on a single-crystal silicon substrate, movable elements (a movable rod, a movable comb electrode, etc.) displaceable in parallel to the substrate surface and stationary parts (a stationary part, etc.), the stationary parts are fixedly secured to the single-crystal silicon substratewith an insulating layersandwiched therebetween, and depressionsare formed in those surface regions of the single-crystal silicon substratewhere no stationary parts are present, and the movable parts are positioned above the depressions. The depressionsform gapslarge enough to prevent foreign bodies from causing troubles such as malfunction of the movable parts and shoring.

In a microminiature moving device that has disposed, on a single-crystal silicon substrate, movable elements (a movable roda movable comb electrodeetc.) displaceable in parallel to the substrate surface and stationary parts (a stationary partetc.), the stationary parts are fixedly secured to the single-crystal silicon substratewith an insulating layersandwiched therebetween, and depressionsare formed in those surface regions of the single-crystal silicon substratewhere no stationary parts are present, and the movable parts are positioned above the depressionsThe depressionsform gapslarge enough to prevent foreign bodies from causing troubles such as malfunction of the movable parts and shoring.

Microminiature moving device and method of making the same

An optical switch, wherein the first and second output ports (optical fibers) are disposed on the opposite sides of the input port (optical fiber) so as to form acute angles with respect to the input port, the input port and the first output port are optically coupled to each other through a first mirror surface, and the input port and the second output port are optically coupled to each other through a second mirror surface. The incident angles of an incident light beam with respect to the mirror surfaces are equalized, and optical path lengths between the input port and the first and second output ports are equalized. The actuator inserts and withdraws the second mirror surface on a position at the front of the first mirror surface.

Optical switch

The end parts of three optical waveguide parts are supported, mutually in parallel, on a substrate, the end part of the center optical waveguide part being one input port and the end parts of other two optical waveguide parts being a first and a second output port, the emitted light from the input port is switched, by means of a first moving mirror and a second moving mirror which are switchingly inserted into positions having the same distance from the end face of the input port, to either the first output port side or the second output port side, the light from the first moving mirror and the light from the second moving mirror being reflected respectively in a first fixed mirror or a second fixed mirror, the light being respectively coupled to the first or the second output port.

Optical switch with three optical ports on one side

There is provided an optical fiber device including two optical fibers, rod lenses, and an optical functional element. The two rod lenses have the same refractive index distribution and the front face of each is respectively formed, at the approximate midpoint of a position where the mode field diameter of the propagating light emitted from the optical fiber and propagating through the interior of the rod lens forms a local maximum, and a position where the mode field diameter, in case the same rod lens is assumed to be extended in the axial direction, forms a local minimum subsequent to the aforementioned local maximum, in the propagation direction of the same propagating light, perpendicularly to the axis. Also, both front faces of the two rod lenses are arranged symmetrically with respect to a point where a beam waist is formed.

Growing community of inventors

Tokyo, Japan

Yoshichika Kato