Stanley Electric Co., Ltd

Other

Ricoh Company, Ltd.

Yoshiaki Yasuda

Takanori Aimono

Masanao Tani

Masahiro Akamatsu

Takahiro Matsumoto

Eiji Mochizuki

Teruo Koike

Yasuyuki Kawakami

Yukito Sato

Koichi Okamoto

Tetsurou Saitoh

Mitsuyasu Kumagai

Hirofumi Chiba

Shuji Tanaka

Yoshiro Sato

Yukio Suzuki

In a light emitting device, in a bottom surface of a cavity of a Si substrate, slit-shaped through holes and through electrodes that fill the through holes are provided at a position facing a first element electrode of a light emitting element. A length of an upper surface of the through electrode in a long axis direction is larger than a height of the through electrode in a thickness direction of the Si substrate. A joining layer having a shape corresponding to a shape of the upper surface of the through electrode is disposed between the first element electrode of the light emitting element and the upper surface of the through electrode facing the first element electrode. The entire upper surface of the through electrode is joined to the first element electrode via the joining layer.

Light emitting device and manufacturing method therefor

In a biaxial optical deflector, multiple mirror units are arranged in an array. Each of the mirror units includes one mirror and one mirror driver coupled to said mirror for rocking the mirror.

Biaxial optical deflector including multiple mirror units, laser radar system, and manufacturing method

A two-dimensional optical deflector includes a first SOI structure and a second SOI structure. A height of a monocrystalline silicon support layer of the first SOI structure is smaller than a height of a monocrystalline silicon support layer of the second SOI structure. A mirror includes a monocrystalline silicon active layer of the first SOI structure. An inner frame, an inner piezoelectric actuator and an outer frame include a monocrystalline silicon active layer of the first SOI structure and the monocrystalline silicon active layer of the second SOI structure. An outer piezoelectric actuator includes the monocrystalline silicon active layer of the first SOI structure.

Two-dimensional optical deflector including two SOI structures and its manufacturing method

In a two-dimensional optical deflector including: a mirror; two first torsion bars coupled to the mirror along a first axis; an inner frame surrounding the mirror; two piezoelectric actuators each coupled between the first torsion bars and supported by the inner frame; an outer frame surrounding the inner frame; and two second torsion bars coupled between the inner frame and the outer frame along a second axis; a first permanent magnet layer formed on at least a part of a rear-side surface of the inner frame. A base supports the outer frame. A coil is formed at the base. A magnetic flux generated from the coil interacts with a magnetic flux of the first permanent magnetic layer.

Piezoelectric and electromagnetic type two-dimensional optical deflector and its manufacturing method

A piezoelectric device includes a substrate; an insulating layer provided on the substrate; a lower electrode layer provided on the insulating layer; a piezoelectric structure provided on the lower electrode layer, the piezoelectric structure including at least one conductive layer and multiple piezoelectric layers sandwiching the conductive layer, the conductive layer having the same crystal structure as that of the piezoelectric layers; and an upper electrode layer provided on the piezoelectric structure.

Piezoelectric device including conductive layer, its manufacturing method and optical deflector

In an optical deflector including a mirror, a frame, torsion bars, first and second piezoelectric actuators coupled to both of the torsion bars, and first and second coupling bars, each of the first and second piezoelectric actuators is divided into first, second and third areas in accordance with a polarization polarity distribution obtained by performing a simulation upon the optical deflector where piezoelectric portions with no slits are hypothetically provided in the first and second piezoelectric actuators while a predetermined rocking operation is performed upon the mirror. First piezoelectric portions are formed in the first and third areas of the first piezoelectric actuator, and second piezoelectric portions are formed in the first and third areas of said second piezoelectric actuator. A first drive voltage applied to the first piezoelectric portions is opposite in phase to a second drive voltage applied to the second piezoelectric portions.

Optical deflector including separated piezoelectric portions on piezoelectric actuators and its designing method

An optical deflector is provided which can effectively suppress occurrence of a ringing phenomenon when a piezoelectric actuator is driven with a voltage signal of a sawtooth waveform. An optical deflector Aincludes a control circuitthat detects a mechanical natural frequency relevant to swinging about a second axis Xof a movable part. The control circuitapplies a voltage signal of a sawtooth waveform from which the natural frequency and a harmonic component thereof are removed to outside piezoelectric actuatorsand. The control circuitremoves a frequency component, which is equal to or greater than a second threshold value Gwithin a predetermined frequency range out of frequency components of a voltage signal output from a detecting piezoelectric body, from a drive voltage.

Optical deflector

In an optical deflector apparatus, an optical deflector chip includes a mirror, an actuator adapted to rock the mirror, and first pads on a front surface of the optical deflector chip and connected to the actuator. A first substrate includes second pads on a back surface of the first substrate, and an opening is formed in the first substrate. The front surface of the optical deflector chip is adhered to the back surface of the first substrate in such a way that the first pads of the optical deflector chip are in contact with respective ones of the second pads of the first substrate and the mirror opposes the opening. A back surface of said optical deflector chip is adhered to a front surface of a second substrate.

Optical deflector apparatus including optical deflector chip sandwhiched by two substrates

A light scattering elementis equipped with a transparent, thin film-like optical elementwhich scatters incident laser light, and a thin film-like piezoelectric element, which is sandwiched between two electrodesand which is laminated on a surface of the optical elementthat is different from an optical scattering surface. The light scattering elementaverages a speckle pattern of laser light scatted by the optical scattering surfaceand emitted therefrom by vibration of the piezoelectric elementgenerated when alternating voltage is applied between the two electrodes

Light scattering element, optical scanning device, and image displaying device

A wafer-level optical deflector assembly is formed on a front surface side of a wafer. Then, the front surface side of the wafer is etched by using elements of the wafer-level optical deflector assembly, to form a front-side dicing street. Then, a transparent substrate with an inside cavity is adhered to the front surface side of the wafer. Then, a second etching mask is formed on a back surface side of the wafer. Then, the back surface side of the wafer is etched to create a back-side dicing street. Then, an adhesive sheet with a ring-shaped rim is adhered to the back surface side of the wafer. Then, the transparent substrate is removed. Finally, the ring-shaped rim is expanded to widen the front-side dicing street and the back-side dicing street to pick up optical deflectors one by one from the wafer.

Method for manufacturing optical deflector for forming dicing street with double etching

A headlamp for a vehicle includes a light source adapted to emit a spotlight, a lens adapted to receive and transmit the spotlight, a lens actuator adapted to adjust a size of the spotlight transmitted through the lens, a two-dimensional optical deflector adapted to deflect the spotlight from the lens to an illumination area ahead of the vehicle, and a control circuit configured to control the lens actuator in such a way that irregularity of illumination in the illumination area is avoided.

Vehicle headlamp including two-dimensional optical deflector

A driver for driving an optical deflector includes a mirror, a movable frame for supporting the mirror, a support body surrounding the movable frame, and a first group of piezoelectric actuators and a second group of piezoelectric actuators alternating with the first group of piezoelectric actuators. A first drive voltage for the first group of piezoelectric actuators has first repeated waves each with a first rising period. A second drive voltage for the second group of piezoelectric actuators has second repeated waves each with a second falling period corresponding to the first rising period of the first drive voltage and a second rising period corresponding to the first falling period of the first drive voltage. Frequencies of the first and second repeated waves exclude natural frequencies of a mechanically-vibrating system of the mirror with respect to the axis thereof depending upon the piezoelectric actuators.

Driver for optical deflector using complex-sinusoidal-wave drive voltages and method for setting the same

Provided is a light source apparatus having a phosphor layer which is subjected to a light beam of a predefined wavelength emitted from a solid light source element as an excitation light beam and which generates fluorescent beam by being excited by the incident excitation light beam and emits the fluorescence beam to outside, and a metal layer which is joined to a predefined surface among outer surfaces of the phosphor layer except an incident surface of the excitation light beam and an outgoing surface of the fluorescence beam for converting excitons excited from a section of the phosphor layer close to the predefined surface into a light beam via surface plasmon polaritons. The light beam converted from the excitons via the surface plasmon polaritons is emitted out of the outgoing surface of the phosphor layer together with the fluorescence beam.

Light source apparatus having a solid light source element and a phosphor

An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (to) that cause a reflecting plate () to oscillate rotationally, centering upon a pair of flexible support units (and). The optical deflector forms a single structure of the oscillating plates (to), the reflecting plate (), the flexible support units (and), and a support body (), by connecting one set of the terminals of the oscillating plates (to) of the suite of piezoelectric unimorph oscillating bodies (to) to the flexible support units (and), and connecting the other set of terminals to the support body (). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (to) each respectively comprise a plurality of parallel oscillating bodies (to--to--to-), and (-to-), and a suite of parallel actuators (-to--to-, and-to-).

Optical deflector and optical device

An actuator device for optical deflector includes a base for mounting an optical deflector deflecting a light beam from a light source, at least one piezoelectric actuator translating and vibrating said base; and a supporting body supporting said piezoelectric actuator.

Growing community of inventors

Yokohama, Japan

Yoshiaki Yasuda