Nec Corporation

Nippon Telegraph and Telephone Corporation

Tokyo Electron Limited

Mitsubishi Denki Kabushiki Kaisha

Nec Electronics Corporation

Nifco Inc.

Yoshiaki Yamada

Masahiro Suzuki

Kei Kitamura

Yasuhito Saiga

Hitoshi Kosugi

Takashi Yokoyama

Takuya Ohara

Taro Yamamoto

Hideki Maeda

Kaoru Arai

Koji Kishimoto

Mitsuhiro Teshima

Masahiro Yokota

Tadayuki Yamaguchi

Kengo Shintaku

Takashi Kotanigawa

Takafumi Hamano

Yuichi Yamamoto

Kenji Hisadome

Yoshihisa Matsubara

Takashi Ishigami

Yoshiaki Kisaka

Akira Hirano

Takafumi Tanaka

Tetsuya Taguwa

Masashi Ohmori

Toshiki Shinmura

Osamu Ishida

Junji Iwasaki

Yuuichi Yamamoto

Hiroshi Watanabe

Takayuki Saito

Akira Ono

Michio Nagai

Masahito Tomizawa

Etsushi Yamazaki

Seiji Okamoto

Shinichi Watanuki

Tomoaki Kato

Keiichi Tanaka

Kengo Horikoshi

Mitsuteru Yoshida

Tetsuro Inui

Fukutaro Hamaoka

Tatsuya Uchikawa

Eiichi Ishikawa

Nobukazu Ito

Tomoyoshi Kataoka

Shigeki Aisawa

Asuka Matsushita

Kuniko Miyakawa

Shokei Kobayashi

Seiki Kuwabara

Koji Urabe

Naohisa Tamada

Kazuo Sawai

Michiko Yamanaka

Tadashi Miyagi

Shunichiro Sato

Midori Tanaka

Kiyonori Kajiyana

Seiji Fujimoto

Yoko Arimitsu

A transmission device includes a frame processing unit, a redundant channel processing unit, a transmission and reception unit, and a channel selection unit. The frame processing unit generates division frames, adds error detection signals to the division frames, and outputs the division frames to which the error detection signals are added to a plurality of data channels. The redundant channel processing unit generates, from the division frames, one or more redundant frames including restoration information that enables restoration of the division frames, and outputs the generated redundant frames to a data channel. The transmission and reception unit outputs the division frames and the redundant frames to a transmission line. The channel selection unit allocates the division frames and the redundant frames to allocable transmission and reception units.

Transmitting apparatus, receiving apparatus, and transmission system

A communication system transmits relay data through a communication path including a plurality of sections in which different communication schemes are used. A relay communication device is provided between a first section and a second section which are adjacent sections. The relay communication device includes a receiving unit receiving the relay data from the first section through a frame of a first communication scheme, and a relaying unit configuring, in a frame of a second communication scheme used to transmit the relay data to a relay destination, signal quality information representing signal quality calculated for a physical link in each of the sections through which the relay data is transmitted before arriving at the relay communication device, and outputting the frame of the second communication scheme to the second section.

Signal quality information notification method and relay communication apparatus

A hole plug for waste water includes a protruding portion having a flange with a dish shape, and a drain hole therein; and a cylindrical portion projecting from the protruding portion and formed at an inner face side of the flange, the cylindrical portion being configured to be inserted into and pass through an attachment hole of a panel. The cylindrical portion includes an engagement leg provided in a circumference configured to detachably engage the attachment hole, a cylinder inside, and a shielding wall which is positioned above the drain hole, is larger than a horizontal cross-sectional surface of the drain hole, and is provided such that the cylinder inside and the drain hole can communicate with each other for allowing a liquid entering into an inside of a vehicle to flow into the cylinder inside and flow out to an outside of a vehicle from the drain hole.

Hole plug for waste water

An optical transmitter of an optical data transmission system transmitting data through an optical fiber transmission path includes a main signal generator that converts first transmission data into a predetermined signal format to generate a first signal, a DCSK modulator that DCSK-modulates second transmission data to generate a second signal, a signal-multiplexer that performs time-division multiplexing of the first signal and the second signal, and an electro-optical converter that converts a multiplexed signal obtained by the time-division multiplexing of the signal-multiplexer from an electric signal into an optical signal, and outputs the optical signal to the optical fiber transmission path.

Optical transmitter, optical receiver, optical data transmission system, optical transmission method, and optical reception method

In the optical transport system a transport frame generator divides a transport frame accommodating plural client signals into plural transmission signals. Subcarrier transmission units convert the signals into optical signals using different optical carriers and transmit the converted optical signals. Subcarrier reception units receive the transmitted optical signals and convert the optical signals into reception signals. A transport frame termination unit combines the reception signals to restore the transport frame. A time-demultiplexing processor time-demultiplexes the restored transport frame to be separated into the client signals. A time slot control unit determines a new time slot allocation when time-multiplexing the client signals in the transport frame and stops supply of electric power to a subcarrier transmission unit and a subcarrier reception unit that transmit and receive an optical signal to which the client signals are not allocated.

Optical transport system and resource optimization method

A framer in a transmission device allocates plural optical channel time slots to a plurality of logical prioritized paths. It allocates received client signals to the allocated time slots, and transmits the client signals by a plurality of optical subcarriers that use a plurality of optical wavelengths corresponding to the plurality of time slots. The framer includes: a time slot allocation unit that, in a case where an optical wavelength corresponding to a time slot allocated to a logical path having a high transmission priority is not used, allocates at least one of the plurality of time slots to the logical path having the high transmission priority while the time slot corresponding to the unused optical wavelength is avoided, to change the time slot allocated to the logical path having the high transmission priority.

Framer and framing method

A multilane transmission device that transmits data frames by using a plurality of lanes, comprising: a data frame allocating unit that allocates data frames based on a transmission destination; a flow group information sequence information adding unit that adds flow group information indicating a flow group corresponding to a transmission source and transmission destinations and sequence information indicating a sequence of the data frames to the data frames allocated based on each transmission destination by the data frame allocating unit; and a lane selecting/outputting unit that transmits the data frames having the respective flow group information and the respective sequence information added thereto by the flow group information sequence information adding unit to the transmission destinations by using one or more lanes corresponding to the respective flow group information.

Multi-lane transmission device and multi-lane transmission method

An object is to enable erasure correction even at the time of a degeneration operation and reduce the number of necessary parallel media through dynamic setting of degree of redundancy. A parallel data encoding/decoding system performs parallel data transmissions using a plurality of lanes from an encoder to a decoder. The encoder encodes products of elements of an encoding vector M of symbols of each lane and a state vector U indicating validity of the symbols, and transmits the state vector U along with a transmission vector Y obtained through the encoding. The decoder decodes a subset Mconstituted of valid elements of the encoding vector M using a received reception vector Y', the received state vector U, and an erasure vector E indicating whether each element of the transmission vector has been erased in a transmission/reception section.

Encoding/decoding system for parallel data

A framer in a transmission device that allocates time slots of an optical channel to a logical path, divides client signals received via the logical path to the time slots allocated to the logical path, and transmits the client signals by a plurality of optical subcarriers using optical wavelengths correlated with the time slots includes: a time slot allocating unit configured to perform a process of reducing a transmission band of the logical path when some of the optical wavelengths are unavailable and changing the time slots allocated to the logical path depending on the reduced transmission band to avoid using the time slots corresponding to the unavailable optical wavelengths.

A transport apparatus includes: a client signal transceiving unit which transceives a client signal; a line signal transceiving unit which performs electric-optic conversion on a line signal to be transmitted, transmits an optical line signal, performs optic-electric conversion on a received line signal, and outputs an electrical line signal; and a plurality of signal processing units which perform signal processing on the client signal to generate the line signal to be transmitted and perform signal processing on the electrical line signal to generate the client signal. Each of the plurality of signal processing units includes a signal transceiving unit which performs transfer of a branched signal obtained by branching a signal to be transmitted and a merged signal obtained by merging received signals with another signal processing unit, and the signal transceiving unit of each of the plurality of signal processing units and the signal transceiving unit of the other signal processing unit are coupled via an inter-chip wiring.

Transport apparatus and transport method

There is provided a tray which is connected to a plurality of transmitters that multicarrier-transmit a plurality of parallel signals by optical subcarriers. The framer selects time slots to be allocated to a path to be accommodated such that the number of optical subcarriers corresponding to the time slots satisfies a predetermined condition on the basis of empty time slots which are specified by path accommodation information indicating a correspondence between paths allocated to a client signal and time slots in a signal frame and the optical subcarriers corresponding to the empty time slots indicated by time slot information indicating a correspondence between the time slots and the optical subcarriers, and sets the selected time slot in the path accommodation information. The framer sets a client signal to the time slots on the basis of the path accommodation information.

Framer, optical transmission device, and framing method

It is an object to provide a technique capable of using a single framer as a necessary framer and causing the framer to be shared among a plurality of transmission destinations and priorities when coping with a plurality of transmission destinations or priorities and a change in a bandwidth of a physical lane that is caused by a change in a modulation scheme or a change in the number of wavelengths. A multilane transmission device that allocates client signals based on a transmission destination or a priority, decides the number of virtual lanes necessary for transmission of the client signals allocated based on each transmission destination or each priority, allocates the client signals allocated based on each transmission destination or each priority to the virtual lanes whose number has been decided, and frames the client signals allocated to the virtual lanes as transport frames, multiplexes the virtual lanes into a physical lane, and transmits the framed transport frames by using the physical lane.

Such a film forming method is provided that can prevent peeling of surface films including a resist film from a substrate during immersion exposure. The film forming method includes the steps of forming surface films including a resist film and a protective film covering the resist film over a surface of a wafer, and forming an edge cap film by supplying an edge cap film material to at least a boundary portion including a periphery of the wafer and peripheries of the surface films such as the protective film.

Film forming method, film forming apparatus and pattern forming method

A substrate transfer method for transferring target substrates proceeds in a substrate processing system for performing processes including a photolithography sequence on the target substrates. The system includes a first automated substrate transfer line configured to transfer the target substrates among a plurality of process sections for respectively performing processes on the target substrates, and a second automated substrate transfer line of a cyclical type dedicated to a plurality of process apparatuses of a photolithography process section, which are configured to perform a series of processes in the photolithography sequence, the second automated substrate transfer line being located relative to the first automated substrate transfer line so as for the target substrates to be transferred therebetween. The method includes, in order to proceed with the photolithography sequence, transferring the target substrates among the process apparatuses in the photolithography process section by use of the second automated substrate transfer line.

Substrate transfer method for performing processes including photolithography sequence

A PEB unit has a first heat plate and a second heat plate. After an exposure process for a resist film for EUV on a wafer and before a development process, the PEB unit heats the wafer through the first heat plate at a first heating temperature. A heating time through the first heat plate is not less than 10 seconds and not more than 30 seconds. Thereafter, the PEB unit heats the wafer through the second heat plate at a second heating temperature lower than the first heating temperature. A temperature difference between the first heating temperature and the second heating temperature is not less than 20&#xb0; C. and not more than 60&#xb0; C.

Substrate processing method, computer-readable storage medium and substrate processing system

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Tokyo, Japan

Yoshiaki Yamada