Kabushiki Kaisha Toshiba

Toshiba Kikai Kabushiki Kaisha

Yoshiaki Tada

Toru Tojo

Ryoichi Hirano

Shusuke Yoshitake

Makoto Kanda

Yoshiaki Tsukumo

Kotei Iwata

A method of transferring a sample to and from a treating chamber kept in a vacuum atmosphere through a pressure regulatively preparatory chamber. The sample is contained in the sample transfer container, which is kept air-permeable by a dust filtering filter, in a cleaned atmosphere before the sample is transferred to the treating chamber. The sample transfer container is transferred into the preparatory chamber, and the inside of the preparatory chamber is evacuated to a vacuum atmosphere. The sample is then extracted from the sample transfer container in the vacuum atmosphere and is transferred into the treating chamber. Also disclosed is an apparatus for supporting the sample transferring method.

Sample transferring method and sample transfer supporting apparatus

A method of transferring a sample to and from a treating chamber kept in a vacuum atmosphere through a pressure regulative preparatory chamber. The sample is contained in the sample transfer container, which is kept air-permeable by a dust filtering filter, in a cleaned atmosphere before the sample is transferred to the treating chamber. The sample transfer container is transferred into the preparatory chamber, and the inside of the preparatory chamber is evacuated to a vacuum atmosphere. The sample is then extracted from the sample transfer container in the vacuum atmosphere and is transferred into the treating chamber. Also disclosed is an apparatus for supporting the sample transferring method.

False twisting apparatus including opposing rotary discs between which a yarn is clamped is provided with a device for supporting the rotary discs to be movable in the axial direction toward and away from each other and is also provided with a member for urging the rotary discs to form a small gap therebetween.

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Shizuoka-ken, Japan

Yoshiaki Tada