Pioneer Corporation

Pioneer Electronic Corporation

Nuflare Technology, Inc.

Yoshiaki Kojima

Yasumitsu Wada

Hiroaki Kitahara

Masahiro Katsumura

Osamu Kasono

It is an object of the present invention to make it possible to stably and correctly measure a changing amount of a beam position when a beam displacement is measured prior to a recording operation performed by an electron beam recording apparatus. A measuring device for measuring a displacement of an electron beam prior to a recording operation, comprises: a knife edge disposed at an irradiating position of the beam spot; detecting means (Farady cup or the like) for detecting an electron beam irradiating through the knife edge; filter means (high frequency cut filter or the like) for removing a changing frequency component of measurement subject from an output of the detecting means; and control means for controlling a reference position of the electron beam in accordance with an output from the filter means, in a manner such that the center of the beam spot will be at the front end position of the knife edge. A displacement of the beam spot is measured in accordance with an output change of the detecting means when the center of the beam spot deviates from the front end of the knife edge.

Electron beam displacement measuring method, electron beam displacement measuring device, and electron beam recording apparatus

To provide a new recording method and recording apparatus with respect to an optical recording medium, the recording method and recording apparatus being able to deal with a high density of an optical recording medium of recent years. Recording of a recording track and a prepit is carried out by sequentially deflecting a single beam.

Information recording method and information recording apparatus

An apparatus includes a beam deflection portion for deflecting the electron beam to change an irradiation position of the electron beam; a synchronization signal generation portion for generating a synchronization signal which is in synchronization with the rotation of the substrate; a controller for controlling the beam deflection portion on the basis of the synchronization signal in order to deflect the electron beam in a rotational radial direction of the substrate and in a rotational tangential direction of the substrate opposite to a rotational direction of the substrate, while drawing transition is performed from one circle to another circle; and a beam cutoff portion for cutting off the irradiation of the electron beam on the substrate, for a period during the electron beam is deflected in the rotational radial direction.

Electron beam lithography apparatus

A beam adjusting sample having a flat surface being like a plate and having two edges orthogonal to each other is employed. A beam is applied to the beam adjusting sample to detect an amount of the beam passing through the beam adjusting sample. The beam vertically scans the two edges.

Beam adjusting sample, beam adjusting method and beam adjusting device

An optical disk(sample) is laid on a sample moving unitwithin a vacuum chamber. An electron beam radiating mechanismradiates an electron beam to the optical diskwhile moving the optical diskat a constant speed. Electron detecting meansdetects an electron from the optical disk. Thus, the track pitch is measured on the basis of a detected electron signal and a measured movement amount of the optical disk. Also, the electron beam radiating mechanismis provided with a fast deflectorfor averaging within a deflection area to measure the track pitch.

Method and apparatus for measuring a minute pitch

Preceding to the reading out of the recording information of the optical disk by the pick-up, the height of the foreign material existing at the light converging position on the information reading surface is detected by the detector, and when the height of the foreign material is higher than the floating height h of the SIL, the magnetic field is generated by applying the control current corresponding to the height of the foreign material to the coil as the magnetic field generator at the timing before the foreign material is moved to the information reading position of the pick-up by the rotation of the optical disk. Then, when the magnetic field is provided to the magnetic substance fixedly holding the SIL which is floating, the movement operation to separate the SIL to the higher position than the height of the foreign material from the information reading surface together with the magnetic substance, is conducted.

Optical head apparatus

A laser-based measuring apparatus divides a light beam from a laser light source into at least two light beams, passes the light beams through different optical paths from each other, recombines the light beams, has the light beams interfere with each other to generate interfered light, opto-electrically transduces the interfered light to an optical frequency, and measures the amount of travel of an object which changes an optical path length of a portion of an optical path based on the optical frequency. The measuring apparatus has a portion for generating at least two measuring light beams from the laser light source, two reflection planes included in an object moving on a measuring axis, arranged back-to-back to each other on the measuring axis, and an opposing incident optical system for directing the measuring light beams into the reflection planes, respectively, such that the measuring light beams oppose to each other on the measuring axis.

Laser-based measuring apparatus for measuring an axial run-out in a cylinder of rotation and method for measuring the same utilizing opposing incident measuring light beams

A recording apparatus of a master disc of optical discs which can irradiate a recording beam to a preferable position on the master disc even when a vibration occurs in a rotary shaft to hold the master disc or when a rotational fluctuation occurs in a spindle motor. An angle position in the rotating direction of the rotary shaft and a displacement of the rotary shaft in a radial direction of the master disc are detected. Based on the angle position and the displacement, the present deviation at the present angle position from the reference position of the rotary shaft is calculated. Based on the present deviation, the irradiating spot position is adjusted.

Recording apparatus of master discs of optical discs

There is provided an information recording apparatus having a vacuum system. The apparatus includes a vacuum chamber connected with a first evacuator device. An electronic beam producing device is partially enclosed in the vacuum chamber for emitting an electronic beam for recording information on a recording medium. A moving stage is provided in the vacuum chamber for linearly moving the recording medium in a vacuum atmosphere within the vacuum chamber. A spindle is disposed in the vacuum chamber for rotating the recording medium. The spindle is supported on an air bearing and is rotatably driven by a spindle motor. A magnetic fluid seal producing device is provided around the spindle close to the vacuum chamber side. A pressure differential chamber is provided around the spindle close to the air bearing side. The pressure differential chamber is connected with a second evacuator device.

Information recording apparatus having a vacuum system

An information recording apparatus including a device for driving an optical-disk's master disk, an electron lens barrel for having an electron beam irradiate a recording surface of a disk, a translational device for producing, between the disk and the electron lens barrel, a relative movement in a direction parallel to the recording surface and a container for enclosing the elements of the apparatus adapted to support a vacuum atmosphere. The driving device includes a turn table 4, a spindle 14a for supporting the turn table, a motor 14 for driving the spindle, and a magnetic shield for preventing magnetic fields of the motor from leaking outward. The motor is enclosed in the shield to prevent its magnetic fields from affecting the electron beam, which makes it possible to record information with high accuracy. The use of the motor as a drive source realizes easier and more responsive control of the turn table than that in the prior art.

Information recording apparatus having magnetic shield means

An object carriage system is developed which can suppress any vibration even if an object to be carried contains a source of vibration. The object carriage system comprises a carriage for carrying an object, a resilient supporting means for resiliently supporting the carriage over the floor, a vibration suppressing means for suppressing the vibration of the carriage relative to the floor, acceleration detecting means for detecting an acceleration of the carriage and producing a corresponding acceleration signal, a mass movably supported by the carriage, and driving means for driving the mass in the direction in which the acceleration takes place in accordance with the acceleration signal.

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Saitama, Japan

Yoshiaki Kojima