Tohoku University

Sintokogio, Ltd.

Huawei Technologies Co., Limited

Yoshiaki Kanamori

Yoshikane Tanaami

Miyuki Hayashi

Kazuhiro Hane

Feng Yu

Taiyu Okatani

Daisuke Ema

Mizuhisa Nihei

In order to reduce the chance that a metasurface pattern is damaged by electrostatic discharge, a force sensor module includes a first substrate having light transparency; a metasurface pattern provided on a first principal surface; a second substrate provided so as to face the first substrate and including a second principal surface facing the first principal surface; a reflective layer provided on the second principal surface; a spacer layer provided on the first principal surface and made of an electrically-conductive material; a joining layer for joining the second principal surface and the spacer layer together; and a grounding wire connected to the spacer layer.

Force sensor module

A force sensor is provided, the force sensor including: a first substrate; a metasurface pattern provided on a principal surface; a protective layer covering the metasurface pattern; a second substrate provided so as to face the first substrate; a reflective layer provided on a second principal surface; and a spacer defining a spacing between the first substrate and the second substrate, so that the force sensor is capable of offering desired response characteristics specified at the time of design.

Force sensor

The present invention provides a transmission guided-mode resonant grating integrated spectroscopy device (transmission GMRG integrated spectroscopy device) characterized by comprising, disposed in this order on an optical detector array in which a plurality of diodes are mounted on a substrate made of a semiconductor: a transparent spacer layer; a waveguide layer; a transparent buffer layer provided as desired; a transmission metallic grating layer having a thickness causing surface plasmon; and a transparent protection film layer which is provided as desired.

Transmission guided-mode resonant grating integrated spectroscopy device and method for manufacturing same

Growing community of inventors

Sendai, Japan

Yoshiaki Kanamori