Mitsubishi Electric Corporation

Bridgestone Corporation

Mitsubishi Denki Kabushiki Kaisha

Kabushiki Kaisha Bridgestone

Kabushiki Kaisha Sg

Yoshiaki Hirata

Nobuaki Konno

Takahiko Ito

Yoshitaka Kajiyama

Kozo Ishida

Masahiro Tsugai

Yukihisa Yoshida

Akio Oobayashi

Keigo Kikuchi

Tomoyuki Kaneko

Takao Kokubu

Eiji Yoshikawa

Shigeru Kaneko

Wataru Ichikawa

Yuji Matsuki

Norimichi Uchida

Hiroki Kunitake

Yoshio Nohara

Takahiro Gotou

Yoshihiro Murota

Mikiya Ito

Yusuke Shirayanagi

An optical scanning device includes a reflector, a rotator, a first torsion beam and a second torsion beam, a first support part, a second support part, a first elastic layer, and a second elastic layer. The first elastic layer is superposed on the first torsion beam. The second elastic layer is superposed on the second torsion beam. A vertical dimension of an active layer is smaller than a horizontal dimension of the active layer in a cross section orthogonal to a direction in which the rotator is interposed between the first torsion beam and the second torsion beam. A material of the first elastic layer and the second elastic layer is higher in fatigue life than metal.

Optical scanning device, distance measuring device, and method for manufacturing optical scanning device

An optical scanning device includes a first structure and a second structure. The first structure includes a support, a driver, a first columnar body, a driving section, and a pair of beams. The support includes a support body and a flat section. The pair of beams connects the driver and the flat section. The driving section includes a coil, a pair of electrode pads, and a magnet. The second structure is provided with a reflector.

Optical scanning device and method for manufacturing same

A MEMS mirror device includes a frame body (an outer movable frame body), an inner movable member, a first beam, a reflective mirror member, and a coupling member. The inner movable member is disposed inside the frame body. The first beam couples the inner movable member rotatably to the frame body. The reflective mirror member has a reflective surface and a rear surface. The coupling member couples the reflective mirror member and the inner movable member. The first beam is coupled to the inner movable member at the rear surface of the reflective mirror member. The MEMS mirror device may be reduced in size.

MEMS mirror device and method of manufacturing the same

An optical scanning device comprises a scanning structure, an anchor, and a drive unit. The drive unit includes a first drive unit and a second drive unit. The first drive unit includes a first drive beam, an electrode interconnect, paired supports, and a thin film magnet. The first drive beam has a first fixed end connected to the support and a first drive end connected to the scanning structure. The electrode interconnect is formed on the first drive beam. The supports are connected to the anchor and disposed to sandwich the first drive beam. The thin film magnet is disposed on each of the supports. The thin film magnet is disposed in such a manner that a magnetic line of force is generated in a direction intersecting a direction in which the electrode interconnect extends.

Optical scanning device and method for manufacturing the same

An optical scanning device includes a mirror and a drive beam. The drive beam includes a piezoelectric portion. The piezoelectric portion is partitioned by a plurality of first grooves into a plurality of piezoelectric bodies. The piezoelectric bodies are reduced in length in an X-axis direction as the piezoelectric bodies approach one end side connected to an anchor. The piezoelectric bodies are reduced in length in the X-axis direction as the piezoelectric bodies approach the other end side connected to a link beam.

Optical scanning device and method of manufacturing the same

An optical scanning apparatus includes a light source, a substrate, a reflection member, a drive unit, and a controller. A scanning mirror and an attitude detector are integrated with substrate. An attitude detector outputs a first signal according to an attitude angle of substrate. A reflection member reflects a light beam reflected by scanning mirror. A drive unit can adjust an inclination of reflection member with respect to a main surface of substrate. A controller controls drive unit based on first signal. For this reason, an outgoing angle of light beam from optical scanning apparatus with respect to a horizontal surface can stably be maintained regardless of the inclination of optical scanning apparatus with respect to horizontal surface.

Optical scanning apparatus, method for controlling same, and vehicle

An optical scanning device includes a mirror part having a mirror surface configured to reflect light, N support cantilevers supporting the mirror part swingably, N drive cantilevers, and a plurality of driving piezoelectric elements secured on N drive cantilevers. The mirror part precesses by setting the frequency of AC voltage applied to each of a plurality of piezoelectric elements to a determined common value and setting the phase of AC voltage applied to each of a plurality of piezoelectric elements to a value determined according to the position of each piezoelectric element.

Optical scanning device and method of adjusting optical scanning device

In a mirror driving apparatus, a pair of beam portions includes: a pair of first beams directly adjacent to a reflector to sandwich the reflector between the first beams; and a pair of second beams each coupled to one side of a corresponding one of the first beams, the one side being opposite to the reflector with respect to the corresponding one of the first beams. A plurality of electrodes are spaced from each other on a main surface of each of the first beams, a piezoelectric material being interposed between the main surface and the plurality of electrodes. The first beams are displaceable crosswise to the main surface in respective directions opposite to each other. The pair of second beams is displaceable in a direction connecting the first beams and the second beams, along the main surface of the second beams.

Mirror driving apparatus and method for manufacturing thereof

A semiconductor apparatus includes a first substrate having a first surface, a semiconductor device, a first flexible connecting member electrically connected to the semiconductor device, a first pad connected to the first flexible connecting member, and a second substrate including a bump and an interconnect. The second substrate is a low-temperature sintered ceramic substrate containing alkali metal ions. The first pad is connected to the interconnect via the bump. The first pad has at least a portion overlapping the semiconductor device in a plan view seen in a direction along a normal to the first surface. The semiconductor apparatus can thus be miniaturized.

Semiconductor apparatus having flexible connecting members and method for manufacturing the same

Each of a plurality of ceramic substrate members includes a via reaching an other main surface from one main surface. A gap is formed in each of first and second ceramic substrate members of the plurality of stacked ceramic substrate members to penetrate each of the first and second ceramic substrate members, the first ceramic substrate member being arranged at an outermost surface on one side in a stacking direction of the ceramic substrate members, the second ceramic substrate member being arranged at an outermost surface on the other side opposite to the one side in the stacking direction. At least a portion of a side surface and a bottom surface within the gap are covered with a protection layer. The protection layer is made of a material having an etching rate lower than that of the ceramic substrate members.

Ceramic substrate and method for manufacturing the same

A ceramic substrate is mainly constituted of ceramic, and has a first main surface and a second main surface located opposite to the first main surface. A recessed portion recessed toward a first main surface side is formed in the second main surface. A wire portion extending from an outer peripheral surface of the ceramic substrate to inside of the recessed portion is formed, and a bottom portion located on the first main surface side in the recessed portion has a portion thinner than another portion of the ceramic substrate other than the bottom portion.

Ceramic substrate, bonded body, module, and method for manufacturing ceramic substrate

First and second detection frames are supported by a substrate to be rotatable about first and second torsion axes. A first link beam is connected to the first detection frame on an axis located at a position moved from a position of the first torsion axis in a first direction crossing the first torsion axis and directed to one end side of the first detection frame. A second link beam is connected to the second detection frame on an axis located at a position shifted from a position of the second torsion axis in a second direction opposite to the first direction. An inertia mass body is displaceable in a thickness direction of the substrate by being linked with the first and second detection frames by the first and second link beams, respectively. This constitution makes it possible to obtain a highly precise acceleration sensor hardly influenced by disturbances.

Electrostatic capacitance type acceleration sensor

A hollow-cylindrical portion () inserted in a hollow-cylindrical portion () of one rim section () is provided on the other rim section (). To form a split rim (), part (head portion) of the inner hollow-cylindrical portion () overlaid on the outer hollow-cylindrical portion () is radially outwardly expanded by being elastically deformed by a tapered surface () of a piston () such that the inner and outer hollow-cylindrical portions () are in close contact with each other. As a result, relative positions of the rim sections () are strictly defined, and this enables high assembling accuracy, particularly coaxiality with a high level, to be achieved. A fine fitted to the split rim () can be inspected with high accuracy.

Split rim for tire, method of assembling a rim/tire assembly, and method and device for installing the rim/tire assembly

A split rim for pneumatic tire includes a disk part having a seat portion allowing a corresponding tire bead part to be seated at the radial outer end. First and second pieces are connected to the disk part and have cylindrical parts coaxial with the disk parts. The cylindrical part of the second piece can be inserted into the cylindrical part of the first piece. The cylindrical parts of the first and second pieces overlap with each other in the inserted state and are connected to each other by a fastening mechanism. The fastening mechanism includes a group of claws formed on the inner circumference of the first piece cylindrical part and a group of claws formed on the outer circumference of the second piece cylindrical part.

Split rim for pneumatic tire

An uniformity inspection linecomprises a decision-only linehaving first UF machinesM exclusive for the measurement of the uniformity of a tiresorted and distributed on an automatic sorting lineand a correction-only linehaving second UF machinesM for the correction and re-measurement of the uniformity characteristics of a tire having uniformity characteristics outside specific values measured on the above decision-only line. Since the measurement of uniformity and the correction and re-measurement of uniformity characteristics are performed in different systems, uniformity inspection can be carried out efficiently even when the number of tires whose uniformity characteristics are to be corrected is varied.

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Tokyo, Japan

Yoshiaki Hirata