Murata Machinery, Ltd.

Muratec Automation Co., Ltd.

Yoshiaki Fujiwara

Masanao Murata

Takashi Yamaji

Mitsuya Tokumoto

Kazutoshi Sawado

Koichi Sano

Naofumi Kirihata

A purge stocker has a plurality of shelf zones each including a plurality of purge shelves each configured to purge inside of a storage container placed thereon with purge gas. The purge stocker includes: a flow-rate adjusting unit configured to adjust the flow rate of purge gas supplied to the purge shelves for each shelf zone; a conveying device configured to convey the storage container; and a control unit configured to control conveyance of the storage container by the conveying device. When the number of scattered empty shelves is equal to or larger than a predetermined shelf count that is the number of the purge shelves included in each shelf zone, the control unit performs shelf-changing control of causing the conveying device to transfer the storage container such that an empty shelf zone in which all of the purge shelves included therein are empty is newly formed.

Purge stocker

A transfer system includes: a first shelf disposed to block an original transfer path from a transfer position at which the transporting vehicle transfers the transported object to the port and can transfer the transported object with the transporting vehicle; a second shelf which puts the transported object; a displacing device can reciprocate the transported object with respect to the first shelf and the port in a first direction, toward and away from the processing apparatus, and which can reciprocate the transported object at first direction position, which is away in the first direction by the transported object from the first shelf and the port, in a second direction crossing the first direction; and a communicating device which receives a transfer request from the transporting vehicle, which can transmit a transfer permission to the transporting vehicle.

Transfer system

Growing community of inventors

Ise, Japan

Yoshiaki Fujiwara