Shin-etsu Polymer Co., Ltd.

Mitsubishi Cable Industries, Ltd.

Yoshiaki Fujimori

Masato Takahashi

Osamu Ogawa

Hiroki Yamagishi

Toshiyuki Kamada

Yasuyuki Nishimura

Yoshio Azuma

Naohiro Horita

A substrate container includes: a container main body including an opening and containing a substrate; a lid body closing the opening; and a pair of handles provided on a pair of opposing side walls of the container main body, and the handle is secured to an edge portion of the side wall.

Substrate container and handle thereof

A fit-holding groove is formed by notching the outer periphery of a door element to be fitted to close a container body. A sealing element interposed between the container body and door element is composed of an endless portion to be fitted into the fit-holding groove, a protruding part projected from the peripheral corner of the endless portion, obliquely and outwardly with respect to the open front of the container body, forming a substantially acute angle between itself and the contact surface of the open front of the container body and a pair of fitting ribs projectively formed on the obverse surface of the endless portion so as to be fitted in contact with the compartmentalized inner wall of the fit-holding portion.

Sealing element with a protruding part approximately obliquely outward and a hermetic container using the same

Disclosed is a container box for storage and transportation of wafer materials or other precision substrate plates in the electronic industries as well as for automatic loading of the wafer materials on a wafer-processing machine. Several accessory parts can be mounted on the container box as selected according to the usage conditions of the container box so as to accomplish improvements in the weight decrease, handleableness and storage. The wafer container box consists of a box body having a front opening and a covering thereon and comprises an upper mounting means provided on the top wall of the box body for supporting a robotic flange, a lower side mounting means provided on the outer surface of each of the side walls of the box body for supporting a side rail, and a side mounting means provided on the outer surface of each of the oppositely facing side walls of the box body for supporting a manual handle, each in a demountable fashion.

Wafer container box

A storage container for multiple wafers in alignment in its pod, includes: a hollow door element which opens and hermetically closes the open front of the pod; and a guide arrangement for guiding and positioning the door element into the open front when the door element is closed. This guide arrangement is configured of a first inclined guide portion, at least, formed in the underpart of the opening of the pod, gradually going outwards toward the distal end; and a second inclined guide portion, at least, formed in the underpart of the periphery of the door element, gradually going outwards from the inner side to the outer side and coming in contact with the first inclined guide portion when the door element is closed.

Growing community of inventors

Saitama, Japan

Yoshiaki Fujimori