Applied Materials Israel Limited

Icos Vision Systems Nv

Nano-or Technologies (israel) Ltd.

Yoram Saban

Yoel Arieli

Shay Wolfling

Emmanuel Lanzmann

Alexander Veis

Shay Levavi

Gavriel Feigin

Tal Kuzniz

David Banitt

Yosi Weitzman

Methods and apparatus to perform wavefront analysis, including phase and amplitude information, and 3D measurements in optical systems, and in particular those based on analyzing the output of an intermediate plane, such as an image plane, of an optical system. Measurement of surface topography in the presence of thin film coatings, or of the individual layers of a multilayered structure is described. Multi-wavelength analysis in combination with phase and amplitude mapping is utilized. Methods of improving phase and surface topography measurements by wavefront propagation and refocusing, using virtual wavefront propagation based on solutions of Maxwell's equations are described. Reduction of coherence noise in optical imaging systems is achieved by such phase manipulation methods, or by methods utilizing a combination of wideband and coherent sources. The methods are applied to Integrated Circuit inspection, to improve overlay measurement techniques, by improving contrast or by 3-D imaging, in single shot imaging.

Methods and apparatus for wavefront manipulations and improved 3-D measurements

A method of wavefront () analysis including applying a transform to the wavefront, applying a plurality of different phase changes () to the transformed wavefront (), obtaining a plurality of intensity maps () wherein the plurality of different phase changes are applied to region of the transformed wavefront, corresponding to a shape of the light source.

Spatial wavefront analysis and 3D measurement

A system and method for inspecting an object. The system includes: a traveling lens acousto-optic device adapted to generate a traveling lens that propagates through an active region of the traveling lens acousto-optic device; a first scanner, adapted to direct a beam of light towards the traveling lens while the traveling lens propagates; a first beam splitter, adapted to receive a beam formed by the traveling lens; and to split the scanned beam to multiple illuminating light beams; multiple detectors; and an objective lens; adapted to receive the multiple illuminating light beams, direct the multiple illuminating light beams towards multiple areas of the object, receive multiple collected light beams from the multiple areas of the object, and direct the multiple collected light beams towards the multiple detectors; wherein each detector is associated with an area of the multiple areas.

System and method for inspecting an object using an acousto-optic device

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Shoham, Israel

Yoram Saban